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Microsystem Technologies
Volumn 19, Issue 11, 2013, Pages 1787-1790
The electrical and optical properties of AZO thin film under different post-annealing temperatures
Author keywords

[No Author keywords available]
Indexed keywords

ANNEALING TREATMENTS; ELECTRICAL AND OPTICAL PROPERTIES; NITROGEN ANNEALING; NITROGEN ATMOSPHERES; OPTICAL CHARACTERISTICS; POST-ANNEALING TEMPERATURE; PREFERENTIAL ORIENTATION; RF-MAGNETRON SPUTTERING;
EID: 84887252781     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-013-1837-5     Document Type: Conference Paper
Times cited : (20)
References (17)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.