Formation of low resistance nonalloyed Al/Pt ohmic contacts on n-type ZnO epitaxial layer

Journal of Applied Physics

Volumn 94, Issue 6, 2003, Pages 4225-4227

  Kim, Han Ki ^a   Kim, Kyoung Kook ^a   Park, Seong Ju ^a   Seong, Tae Yeon ^a   Adesida, Ilesanmi ^b  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARRIER CONCENTRATION; EPITAXIAL GROWTH; X RAY PHOTOELECTRON SPECTROSCOPY;

EPITAXIAL LAYERS;

ZINC OXIDE;

EID: 0141886871     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1604475     Document Type: Article

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