Use of ultrasonic cavitation in surface cleaning: A mathematical model to relate cleaning efficiency and surface erosion rate

Annual Technical Meeting of the Institute of Environmental Sciences and Technology 2005, ESTECH 2005 - Building a Solid Foundation

Volumn , Issue , 2005, Pages 1-8

  Nagarajan, Ramamurthy ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Acoustic streaming; Cavitation erosion; Defect reduction; Particle removal; Ultrasonic cleaning; Yield improvement

Indexed keywords

CLEANING EFFICIENCY; DEFECT REDUCTION; PARTICLE REMOVAL; SEMICONDUCTOR WAFER FABRICATION; SUB-MICRON PARTICLES; SURFACE EROSION RATE; ULTRASONIC CAVITATION; YIELD IMPROVEMENT;

ACOUSTIC FIELDS; ACOUSTIC STREAMING; CAVITATION CORROSION; EFFICIENCY; ENVIRONMENTAL ENGINEERING; EROSION; MATHEMATICAL MODELS; SURFACES; ULTRASONIC CLEANING;

CLEANING;

EID: 84886570976     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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