Dynamic Secondary Ion Mass Spectrometry (SIMS)

Surface and Thin Film Analysis: A Compendium of Principles, Instrumentation, and Applications, Second Edition

Volumn , Issue , 2011, Pages 141-159

  Hutter, Herbert ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Depth profile; Element distribution; Isotope sensitivity; Layer analysis; Secondary ion mass spectrometry; Trace elements

Indexed keywords

EID: 84886551032     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527636921.ch8     Document Type: Chapter

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