XPS and AFM characterization of aminosilanes with different numbers of bonding sites on a silicon wafer

Surface and Interface Analysis

Volumn 45, Issue 11, 2013, Pages 1709-1713

  Jaksa G ^a   Stefane B ^b   Kovac J ^a,c  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

^c Centre of Excellence for Polymer Materials and Technologies   (Slovenia)

Author keywords

AFM; aminosilane; self assembled monolayer; silicon; XPS

Indexed keywords

3-AMINOPROPYLDIETHOXYMETHYLSILANE; 3-AMINOPROPYLTRIMETHOXYSILANE; AFM; AMINOSILANES; REACTION CONDITIONS; SELF-ASSEMBLED LAYERS; SENSOR APPLICATIONS; SINGLE-CRYSTAL SILICON WAFERS;

ATOMIC FORCE MICROSCOPY; PHOTOELECTRONS; SELF ASSEMBLED MONOLAYERS; SILICON; WAFER BONDING; X RAY PHOTOELECTRON SPECTROSCOPY;

SILICON WAFERS;

EID: 84886102346     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.5311     Document Type: Article

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