Electroplated nickel multielectrode microprobes with flexible parylene cable for neural recording and stimulation

Journal of Microelectromechanical Systems

Volumn 22, Issue 5, 2013, Pages 1199-1206

  Yu, Huaiqiang ^a   Zheng, Nenggan ^b   Wang, Wei ^a   Wang, Shuo ^a   Zheng, Xiaoxiang ^b   Li, Zhihong ^a  

^a PEKING UNIVERSITY   (China)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

Electroplated nickel; Multielectrode microprobes; Neural recording; Parylene

Indexed keywords

ELECTROPLATED NICKEL; MECHANICAL AND ELECTRICAL; MECHANICALLY ROBUST; MULTI-CHANNEL RECORDING; MULTIELECTRODE MICROPROBES; NEURAL RECORDINGS; NICKEL ELECTROPLATING; PARYLENES;

BIOCOMPATIBILITY; BRAIN; CABLES; NEURONS; NICKEL; NICKEL PLATING;

FLEXIBLE ELECTRONICS;

EID: 84885187823     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2262591     Document Type: Article

References (30)

1. S. Herwik, S. Kisban, A. A. A. Aarts, K. Seidl, G. Girardeau, K. Benchenane, M. B. Zugaro, S. I. Wiener, O. Paul, H. P. Neves, and P. Ruther, "Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording," J. Micromech. Microeng., vol. 19, no. 7, p. 074008, Jul. 2009.
2. P. Norlin, M. Kindlundh, A. Mouroux, K. Yoshida, and U. G. Hofmann, "A 32-site neural recording probe fabricated by DRIE of SOI substrates," J. Micromech. Microeng., vol. 12, pp. 414-419, Jul. 2002.
3. Y. T. Lee, Y. C. Chang, and W. Fang, "Multi-electrode styles with novel sidewall electrode on glass microprobe implemented by Si-via structure," in Proc. MEMS'11, Cancun, Mexico, Jan. 2011, pp. 1043-1046.
4. R. Huang, C. Pang, Y. C. Tai, J. Emken, C. Ustun, R. Andersen, and J. Burdick, "Integrated parylene-cabled silicon probes for neural prosthetics," in Proc. MEMS'08, Tucson, AZ, USA, Jan. 2008, pp. 240-243.
5. K. D. Wise, D. J. Anderson, J. F. Hetke, D. R. Kipke, and K. Najafi, "Wireless implantable microsystems: High-density electronic interfaces to the nervous system," Proc. IEEE, vol. 92, no. 1, pp. 76-97, Jan. 2004.
6. M. E. Merriam, S. Dehmel, O. Srivannavit, S. E. Shore, and K. D. Wise, "A 3-D 160-site microelectrode array for cochlear nucleus mapping," IEEE Trans. Biomed. Eng., vol. 58, no. 2, pp. 397-403, Feb. 2011.
7. R. C. Kelly, M. A. Smith, J. M. Samonds, A. Kohn, A. B. Bonds, J. A. Movshon, and T. S. Lee, "Comparison of recordings from microelectrode arrays and single electrodes in the visual cortex," J. Neurosci., vol. 27, pp. 261-264, Jan. 2007.
8. M. Han, P. S. Manoonkitiwongsa, C. X. Wang, and D. B. McCreery, "In vivo validation of custom-designed silicon-based microelectrode arrays for long-term neural recording and stimulation," IEEE Trans. Biomed. Eng., vol. 59, no. 2, pp. 346-354, Feb. 2012.
9. T. H. Yoon, E. J. Hwang, D. Y. Shin, S. I. Park, S. J. Oh, S. C. Jung, H. C. Shin, and S. J. Kim, "A micromachined silicon depth probe for multichannel neural recording," IEEE Trans. Biomed. Eng., vol. 47, no. 8, pp. 1082-1087, Aug. 2000.
10. M. HajjHassan, V. Chodavarapu, and S. Musallam, "NeuroMEMS: Neural probe microtechnologies," Sensors, vol. 8, no. 10, pp. 6704-6726, Oct. 2008.
11. C. Xu, W. Lemon, and C. Liu, "Design and fabrication of a high-density metal microelectrode array for neural recording," Sens. Actuators A, Phys., vol. 96, pp. 78-85, Jan. 2002.
12. S. Takeuchi, T. Suzuki, K. Mabuchi, and H. Fujita, "3D flexible multichannel neural probe array," J. Micromech. Microeng., vol. 14, pp. 104-107, Jan. 2004.
13. P. S. Motta and J. W. Judy, "Multielectrode microprobes for deep-brain stimulation fabricated with a customizable 3-D electroplating process," IEEE Trans. Biomed. Eng., vol. 52, no. 5, pp. 923-933, May 2005.
14. A. A. Fomani and R. R. Mansour, "Flexible neural microelectrode arrays reinforced with embedded metallic micro-needles," in Proc. 9th Annu. IEEE Conf. Sens., Nov. 2010, pp. 1601-1604.
15. M. Cempel and G. Nikel, "Nickel: A review of its sources and environmental toxicology," Polish J. Environ. Stud., vol. 15, no. 3, pp. 375-382, 2006.
16. H. Yu, S. Wang, W. Wang, and Z. Li, "Fabrication of electroplated nickel multielectrode microprobes with flexible parylene cable," in Proc. MEMS, Paris, France, Jan. 2012, pp. 239-242.
17. C. Pang, J. G. Cham, Z. Nenadic, S. Musallam, Y. C. Tai, J. W. Burdick, and R. A. Andersen, "A new multi-site probe array with monolithically integrated parylene flexible cable for neural prostheses," in Proc. IEEE Int. Conf. EMBS, Shanghai, China, Sep. 2005, pp. 7114-7117.
18. Y. Lei, W. Wang, H. Q. Yu, Y. C. Luo, T. Li, Y. F. Jin, H. X. Zhang, and Z. H. Li, "A parylene-filled-trench technique for thermal isolation in silicon-based microdevices," J. Micromech. Microeng., vol. 19, no. 3, p. 035013, Mar. 2009.
19. E. Meng, P. Y. Li, and Y. C. Tai, "Plasma removal of parylene C," J. Micromech. Microeng., vol. 18, no. 4, p. 045004, Apr. 2008.
20. S. Selvarasah, S. H. Chao, C.-L. Chen, D. Mao, J. Hopwood, S. Ryley, S. Sridhar, A. Khademhosseini, A. Busnaina, and M. R. Dokmeci, "A high aspect ratio, flexible, transparent and low-cost parylene-c shadow mask technology for micropatterning applications," in Proc. Transducers'07, Lyon, France, Jun. 2007, pp. 533-536.
21. R. Wang, X. Huang, G. Liu, W. Wang, F. Dong, and Z. Li, "Fabrication and characterization of a parylene-based three-dimensional microelectrode array for use in retinal prosthesis," J. Microelectromech. Syst., vol. 19, no. 2, pp. 367-374, Apr. 2010.
22. R. Wang, W. Zhao, W. Wang, and Z. Li, "A flexible microneedle electrode array with solid silicon needles," J. Microelectromech. Syst., vol. 21, no. 5, pp. 1084-1089, Oct. 2012.
23. J. F. Hetke, J. L. Lund, K. Najafi, K. D. Wise, and D. J. Anderson, "Silicon ribbon cables for chronically implantable microelectrode arrays," IEEE Trans. Biomed. Eng., vol. 41, no. 4, pp. 314-321, Apr. 1994.
24. T. Stieglitz, H. Beutel, M. Schuettler, and J. U. Meyer, "Micromachined, polyimide-based devices for flexible neural interfaces," Biomed. Microdev., vol. 2, no. 4, pp. 283-294, Dec. 2000.
25. C. A. Gutierrez, C. Lee, B. Kim, and E. Meng, "Epoxy-less packaging methods for electrical contact to parylene-based flat flexible cables," in Proc. Transducers'11, Beijing, China, Jun. 2011, pp. 2299-2302.
26. T. J. Brozoski, D. M. Caspary, and C. A. Bauer, "Marking multi-channel silicon-substrate electrode recording sites using radiofrequency lesions," J. Neurosci. Methods, vol. 150, no. 2, pp. 185-191, Jan. 2006.
27. J. K. Luo, A. J. Flewitt, S. M. Spearing, N. A. Fleck, and W. I. Milne, "Young's modulus of electroplated Ni thin film for MEMS applications," Mater. Lett., vol. 58, nos. 17-18, pp. 2306-2309, Jul. 2004.
28. F. Liu, H. Jiang, W. Zhong, X. Wu, and J. Luo, "Changes in ensemble activity of hippocampus CA1 neurons induced by chronic morphine administration in freely behaving mice," Neuroscience, vol. 171, no. 3, pp. 747-759, Dec. 2010.
29. Z. Feng and D. M. Durand, "Effects of potassium concentration on firing patterns of low-calcium epileptiform activity in anesthetized rat hippocampus: Inducing of persistent spike activity," Epilepsia, vol. 47, no. 4, pp. 727-736, Apr. 2006.
30. J. Bastian and H. Esch, "The nervous control of the indirect flight muscles of the honey bee," Z. Vergl. Phys., vol. 67, no. 3, pp. 307-324, Sep. 1970.