Gaseous mixtures in vacuum systems and microfluidics

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 5, 2013, Pages

  Sharipov, Felix ^a  

^a FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

CLASSICAL PROBLEMS; GASEOUS MIXTURE; GRAPHICAL FORMS; MATHEMATICAL DERIVATION; MODEL MIXTURES; POISEUILLE FLOW; TRANSPORT PHENOMENA; VELOCITY SLIPS;

MICROFLUIDICS; MIXTURES; TRANSPORT PROPERTIES; VACUUM; VACUUM TECHNOLOGY;

GASES;

EID: 84885109795     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4808496     Document Type: Review

References (111)

1. O. B. Malyshev, Vacuum 86, 1669 (2012). 10.1016/j.vacuum.2012.03.047
2. O. B. Malyshev and M. P. Cox, Vacuum 86, 1692 (2012). 10.1016/j.vacuum.2012.03.015
3. R. J. H. Pearce, Vacuum 86, 1725 (2012). 10.1016/j.vacuum.2012.03.048
4. M. Babutzka, New J. Phys. 14, 103046 (2012). 10.1088/1367-2630/14/10/ 103046
5. G. A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows (Oxford University Press, Oxford, 1994).
6. C. Cercignani, Rarefied Gas Dynamics From Basic Concepts to Actual Calculations (Cambridge University Press, Cambridge, 2000).
7. V. V. Aristov, Direct Methods for Solving the Boltzmann Equation and Study of Nonequilibrium Flows (Kluwer Academic Publishers, Dordrecht, The Netherlands, 2001).
8. Handbook of Vacuum Technology, edited by, K. Jousten, (Wiley-VCH Verlag GmbH Co KGaA, Weinheim, 2008).
9. F. Sharipov and V. Seleznev, J. Phys. Chem. Ref. Data 27, 657 (1998). 10.1063/1.556019
10. F. Sharipov, J. Phys. Chem. Ref. Data 40, 023101 (2011). 10.1063/1.3580290
11. A. Agrawal and S. V. Prabhu, J. Vac. Sci. Technol. A 26, 634 (2008). 10.1116/1.2943641
12. A. Ketsdever, N. Gimelshein, S. Gimelshein, and N. Selden, Vacuum 86, 1644 (2012). 10.1016/j.vacuum.2012.02.006
13. L. D. Landau and E. M. Lifshitz, Fluid Mechanics (Pergamon, New York, 1989).
14. J. O. Hirschfelder, C. F. Curtiss, and R. B. Bird, The Molecular Theory of Gases and Liquids (Wiley, New York, 1954).
15. S. Chapman and T. G. Cowling, The Mathematical Theory of Non-Uniform Gases (University Press, Cambridge, 1952).
16. J. H. Ferziger and H. G. Kaper, Mathematical Theory of Transport Processes in Gases (North-Holland Publishing Company, Amsterdam, 1972).
17. S. R. De Groot and P. Mazur, Non-Equilibrium Thermodynamics (Dover Publications, Inc., New York, 1984).
18. F. Sharipov, Physica A 209, 457 (1994). 10.1016/0378-4371(94)90197-X
19. F. Sharipov and D. Kalempa, J. Stat. Phys. 125, 661 (2006). 10.1007/s10955-006-9200-1
20. A. Frezzotti, G. Ghiroldi, and L. Gibelli, Vacuum 86, 1731 (2012). 10.1016/j.vacuum.2012.02.011
21. F. Sharipov and G. Bertoldo, J. Comp. Phys. 228, 3345 (2009). 10.1016/j.jcp.2009.01.016
22. L. Sirovich, Phys. Fluids 5, 908 (1962). 10.1063/1.1706706
23. T. F. Morse, Phys. Fluids 7, 2012 (1964). 10.1063/1.1711112
24. B. B. Hamel, Phys. Fluids 8, 418 (1965). 10.1063/1.1761239
25. L. H. Holway, Phys. Fluids 9, 1658 (1966). 10.1063/1.1761920
26. F. J. McCormack, Phys. Fluids 16, 2095 (1973). 10.1063/1.1694272
27. V. Garzó, A. Santos, and J. J. Brey, Phys. Fluids A 1, 380 (1989). 10.1063/1.857458
28. P. Andries, K. Aoki, and B. Perthame, J. Stat. Phys. 106, 993 (2002). 10.1023/A:1014033703134
29. S. Kosuge, Eur. J. Mech. B/Fluids 28, 170 (2009). 10.1016/j.euromechflu. 2008.05.001
30. P. C. Phillipi and R. Brun, Physica A 105, 147 (1981). 10.1016/0378-4371(81)90067-4
31. P. L. Bhatnagar, E. P. Gross, and M. A. Krook, Phys. Rev. 94, 511 (1954). 10.1103/PhysRev.94.511
32. J. Kestin, K. Knierim, E. A. Mason, B. Najafi, S. T. Ro, and M. Waldman, J. Phys. Chem. Ref. Data 13, 229 (1984). 10.1063/1.555703
33. S. M. Cybulski and R. R. Toczylowski, J. Chem. Phys. 111, 10520 (1999). 10.1063/1.480430
34. T. P. Haley and S. M. Cybulski, J. Chem. Phys. 119, 5487 (2003). 10.1063/1.1600434
35. R. Hellmann, E. Bich, and E. Vogel, Mol. Phys. 105, 3013 (2007). 10.1080/00268970701730096
36. R. Hellmann, E. Bich, and E. Vogel, Mol. Phys. 106, 133 (2008). 10.1080/00268970701843147
37. B. Jaeger, R. Hellmann, E. Bich, and E. Vogel, Mol. Phys. 107, 2181 (2009); 10.1080/00268970903213305
38. B. Jaeger, R. Hellmann, E. Bich, and E. Vogel, Mol. Phys. 108, 105 (2010). 10.1080/00268970903444744
39. F. Sharipov and J. L. Strapasson, Phys. Rev. E 86, 031130 (2012). 10.1103/PhysRevE.86.031130
40. F. Sharipov and J. L. Strapasson, Phys. Fluids 25, 027101 (2013). 10.1063/1.4791604
41. H. A. Kramers and J. Kistemaker, Physica 10, 699 (1943). 10.1016/S0031-8914(43)80018-5
42. V. M. Zhdanov, Sov. Phys. Tech. Phys. 12, 134 (1967).
43. S. K. Loyalka, Phys. Fluids 14, 2599 (1971). 10.1063/1.1693380
44. H. Lang and W. J. C. Muller, Z. Naturforsch. A 30, 855 (1975).
45. Y. Onishi, Z. Angew. Math. Phys. 37, 573 (1986). 10.1007/BF00945431
46. C. Cercignani, M. Lampis, and A. Lentati, in Rarefied Gas Dynamics: Theory and Simulation, edited by, B. D. Shizgal, and, D. P. Weaver, Proceedings of the 18th International Symposium, Vancouver, Canada, Vol. 159, Progress in Astronautics and Aeronautics (AIP, Washington, 1994), pp. 565-573.
47. I. N. Ivchenko, S. K. Loyalka, and R. V. Tompson, J. Vac. Sci. Technol. A 15, 2375 (1997). 10.1116/1.580750
48. I. N. Ivchenko, S. K. Loyalka, and R. V. Tompson, Z. Angew. Math. Phys. 53, 58 (2002). 10.1007/s00033-002-8142-y
49. F. Sharipov and D. Kalempa, Phys. Fluids 15, 1800 (2003). 10.1063/1.1574815
50. C. E. Siewert and D. Valougeorgis, Eur. J. Mech. B/Fluid 23, 709 (2004). 10.1016/j.euromechflu.2003.12.002
51. S. Yasuda, S. Takata, and K. Aoki, Phys. Fluids 16, 1989 (2004). 10.1063/1.1714665
52. R. D. M. Garcia and C. E. Siewert, Eur. J. Mech. B/Fluids 26, 749 (2007). 10.1016/j.euromechflu.2006.12.002
53. F. Sharipov, Eur. J. Mech. B/Fluids 22, 133 (2003). 10.1016/S0997- 7546(03)00017-7
54. J. A. Bentz, R. V. Thompson, and S. K. Loyalka, J. Vac. Sci. Technol. A 17, 235 (1999). 10.1116/1.581577
55. F. Sharipov and D. Kalempa, Phys. Fluids 16, 759 (2004). 10.1063/1.1644572
56. S. Takata, S. Yasuda, S. Kosuge, and K. Aoki, Phys. Fluids 15, 3745 (2003). 10.1063/1.1624075
57. F. Sharipov and D. Kalempa, Phys. Fluids 16, 3779 (2004). 10.1063/1.1781159
58. H. Lang and S. K. Loyalka, Phys. Fluids 13, 1871 (1970). 10.1063/1.1693167
59. H. Lang and S. K. Loyalka, Z. Naturforsch. A 27, 1307 (1972).
60. Y. Onishi, Fluid Dyn. Res. 2, 35 (1987). 10.1016/0169-5983(87)90016-5
61. V. M. Zhdanov and R. V. Smirnova, J. Appl. Mech. Tech. Phys. 19, 656 (1978). 10.1007/BF00850612
62. S. Takata, in Rarefied Gas Dynamics, edited by, T. J. Bartel, and, M. A. Gallis, Proceedings of the 22nd International Symposium (AIP Conference, New York, 2001), Vol. 585, pp. 22-29.
63. F. Sharipov and D. Kalempa, Int. J. Heat Mass Transfer 48, 1076 (2005). 10.1016/j.ijheatmasstransfer.2004.09.035
64. S. K. Loyalka, Phys. Fluids 17, 897 (1974). 10.1063/1.1694828
65. Y. Onishi, Phys. Fluids 9, 226 (1997). 10.1063/1.869164
66. C. E. Siewert and D. Valougeorgis, J. Quant. Spectrosc. Radiat. Transf. 70, 307 (2001). 10.1016/S0022-4073(00)00142-4
67. C. E. Siewert, Z. Angew. Math. Phys. 56, 273 (2005). 10.1007/s00033-004- 3116-x
68. F. Sharipov, P. Fahrenbach, and A. Zipp, J. Vac. Sci. Technol. A 23, 1331 (2005). 10.1116/1.1991882
69. S. Giors, L. Campagna, and E. Emelli, J. Vac. Sci. Technol. A 28, 931 (2010). 10.1116/1.3386591
70. F. Sharipov, L. M. G. Cumin, and D. Kalempa, Eur. J. Mech. B/Fluids 23, 899 (2004). 10.1016/j.euromechflu.2004.03.002
71. K. Koura, Phys. Fluids 13, 1457 (1970). 10.1063/1.1693102
72. D. Valougeorgis, Phys. Fluids 31, 521 (1988). 10.1063/1.866833
73. C. E. Siewert, J. Quant. Spectrosc. Radiat. Transf. 70, 321 (2001). 10.1016/S0022-4073(00)00143-6
74. R. D. M. Garcia and C. E. Siewert, Phys. Fluids 17, 037102 (2005). 10.1063/1.1845911
75. R. D. M. Garcia and C. E. Siewert, Eur. J. Mech. B/Fluids 27, 823 (2008). 10.1016/j.euromechflu.2008.01.004
76. W. Jitschin and S. Ludwig, Vacuum 75, 169 (2004). 10.1016/j.vacuum.2004. 02.002
77. F. Sharipov and G. Bertoldo, J. Vac. Sci. Technol. A 24, 2087 (2006). 10.1116/1.2353847
78. F. Sharipov, L. M. G. Cumin, and D. Kalempa, Physica A 378, 183 (2007). 10.1016/j.physa.2006.11.077
79. S. Kosuge, K. Aoki, and S. Takata, in Rarefied Gas Dynamics., edited by, T. J. Bartel, and, M. A. Gallis, Proceedings of the 22nd International Symposium (AIP Conference, Melvile, 2001), Vol. 585, pp. 289-296.
80. R. D. M. Garcia and C. E. Siewert, Phys. Fluids 19, 027102 (2007). 10.1063/1.2511039
81. A. Raines, Comput. Math. Math. Phys. 48, 306 (2008). 10.1134/ S0965542508020139
82. R. D. M. Garcia and C. E. Siewert, Phys. Fluids 16, 3393 (2004). 10.1063/1.1773711
83. H. Mikami, Y. Endo, and Y. Takashima, Int. J. Heat Mass Transfer 9, 1435 (1966). 10.1016/0017-9310(66)90139-6
84. F. Sharipov and D. Kalempa, J. Vac. Sci. Technol. A 20, 814 (2002). 10.1116/1.1469010
85. S. Naris, D. Valougeorgis, D. Kalempa, and F. Sharipov, Phys. Fluids 17, 100607 (2005). 10.1063/1.1896986
86. F. Sharipov, J. Vac. Sci. Technol. A 17, 3062 (1999). 10.1116/1.582006
87. I. Graur and F. Sharipov, Eur. J. Mech. B/Fluids 27, 335 (2007). 10.1016/j.euromechflu.2007.07.003
88. S. Naris, D. Valougeorgis, D. Kalempa, and F. Sharipov, Physica A 336, 294 (2004). 10.1016/j.physa.2003.12.047
89. V. M. Zhdanov and V. I. Roldughin, Physica A 184, 169 (1992). 10.1016/0378-4371(92)90164-L
90. V. M. Zhdanov and V. I. Roldughin, JETP 86, 1141 (1998). 10.1134/1.558584
91. V. G. Chernyak, V. V. Kalinin, and P. E. Suetin, Int. J. Heat Mass Transfer 27, 1189 (1984). 10.1016/0017-9310(84)90046-2
92. S. Naris, D. Valougeorgis, F. Sharipov, and D. Kalempa, Superlattices Microstruct. 35, 629 (2004). 10.1016/j.spmi.2004.02.025
93. C. E. Siewert and D. Valougeorgis, Eur. J. Mech. B/Fluids 23, 645 (2004). 10.1016/j.euromechflu.2004.03.003
94. R. D. M. Garcia and C. E. Siewert, SIAM J. Appl. Math. 67, 1041 (2007). 10.1137/060673606
95. S. Kosuge and S. Takata, Eur. J. Mech. B/Fluids 27, 444 (2008). 10.1016/j.euromechflu.2007.08.002
96. L. Szalmas, J. Pitakarnnop, S. Geoffroy, S. Colin, and D. Valougeorgis, Microfluid. Nanofluid. 9, 1103 (2010). 10.1007/s10404-010-0631-2
97. L. H. Shendalman, J. Chem. Phys. 51, 2483 (1969). 10.1063/1.1672369
98. V. G. Chernyak, J. Appl. Mech. Tech. Phys. 23, 638 (1982). 10.1007/BF00914140
99. H. Adzumi, Bull. Chem. Soc. Jpn. 12, 285 (1937). 10.1246/bcsj.12.285
100. H. Adzumi, Bull. Chem. Soc. Jpn. 12, 292 (1937). 10.1246/bcsj.12.292
101. C. M. Huang, R. V. Tompson, T. K. Ghosh, I. N. Ivchenko, and S. K. Loyalka, Phys. Fluids 11, 1662 (1999). 10.1063/1.870026
102. L. Szalmas and D. Valougeorgis, Microfluid. Nanofluid. 9, 471 (2010). 10.1007/s10404-010-0564-9
103. T. Kanki and S. Iuchi, Phys. Fluids 26, 3224 (1983). 10.1063/1.864096
104. D. Kalempa and F. Sharipov, Eur. J. Mech. B/Fluids 30, 466 (2011). 10.1016/j.euromechflu.2011.03.004
105. C. Cercignani and F. Sharipov, Phys. Fluids A 4, 1283 (1992). 10.1063/1.858246
106. R. Johnsen and B. Chatterjee, J. Vac. Sci. Technol. A 29, 011002 (2011). 10.1116/1.3520637
107. F. Sharipov, J. Micromech. Microeng. 9, 394 (1999). 10.1088/0960-1317/9/ 4/317
108. F. Sharipov, J. Vac. Sci. Technol. A 14, 2627 (1996). 10.1116/1.579991
109. I. Graur and F. Sharipov, Microfluid. Nanofluid. 6, 267 (2009). 10.1007/s10404-008-0325-1
110. F. Sharipov and D. Kalempa, Phys. Fluids 17, 127102 (2005). 10.1063/1.2140290
111. O. B. Malyshev, C. Day, X. Luo, and F. Sharipov, J. Vac Sci. Technol. A 27, 73 (2009). 10.1116/1.3039679