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Volumn 75, Issue 2, 2004, Pages 169-176
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Dynamical behaviour of the Pirani sensor
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Author keywords
Heat capacity; Pirani gauge; Pulsed operation; Vacuum measurement
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Indexed keywords
ATMOSPHERIC PRESSURE;
COUPLED CIRCUITS;
GAGES;
PRESSURE CONTROL;
PULSATILE FLOW;
SATURATION (MATERIALS COMPOSITION);
SIGNAL PROCESSING;
SPECIFIC HEAT;
THERMAL CONDUCTIVITY;
VACUUM;
COOLING RATES;
PIRANI GAUGE;
PULSED OPERATION;
VACUUM MEASUREMENT;
SENSORS;
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EID: 2942519600
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2004.02.002 Document Type: Article |
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Times cited : (29)
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References (8)
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