Micro capacitive tilt sensor for human body movement detection

IFMBE Proceedings

Volumn 13, Issue , 2007, Pages 195-200

  Zhao, L ^a   Yeatman, E M ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Comb drive; Differential capacitance; MEMS; Suspension beam; Tilt sensor

Indexed keywords

ASPECT RATIO; CAPACITANCE; CAPACITIVE SENSORS; GRAVITATION; MEMS; MOTION ANALYSIS; WEARABLE SENSORS;

COMB DRIVE; DIFFERENTIAL CAPACITANCE; FABRICATION PROCESS; HUMAN BODY MOVEMENT; LOW-POWER CONSUMPTION; MICRO ELECTRO MECHANICAL SYSTEM; SUSPENSION BEAMS; TILT SENSOR;

BODY SENSOR NETWORKS;

EID: 84885033076     PISSN: 16800737     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-70994-7_34     Document Type: Conference Paper

References (13)

1. H. Kawamoto, A Study of Capacitance Type Incline Sensor, Institute of Electric and Electronics Engineering of Japan, vol. R83-56, pp. 13-18, 1984.
2. R. F. Wolffenbuttel and R. P. Van Kampen, An Integrable Capacitive Angular Displacement Sensor with Improved Linearity, Sensors and actuators. A, Physical, vol. 27, pp. 835-843, 1991.
3. F. Bantien, Micromechanical Tilt Sensor. United States Patent, 1992.
4. J. R. Kaienburg, M. Huonker, and R. Schellin, Surface Micromachined Bridge Configurations for Accurate Angle Measurements, Micro electro mechanical systems, Miyazaki, Japan, 2000.
5. H. Ueda, H. Ueno, K. Itoigawa, and T. Hattori, Micro Capacitive Inclination Sensor Utilizing Dielectric Nano-Particles, IEEE, MEMS 2006, Istanbul, Turkey, 2006.
6. A. Selvakumar and K. Najafi, A high-sensitivity z-axis capacitive silicon microaccelerometer with a torsional suspension, Journal of Microelectromechanical Systems, vol. 7, pp. 192-200, 1998.
7. J. W. Weigold, K. Najafi, and S. W. Pang, Design and Fabrication of Submicrometer, Single Crystal Si Accelerometer, Journal of Microelectromechanical Systems, vol. 10, pp. 518-524, 2001.
8. A. Lipson and E. M. Yeatman, Free-Space MEMS tunable optical filter on (110) silicon, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005.
9. V. P. Jaecklin, C. Linder, N. F. De Rooij, and J. M. Moret, Micromechanical comb actuators with low driving voltage, Journal of Micromechanics and Microengineering, vol. 2, pp. 250, 1992.
10. R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, Comb-drive actuators for large displacements, Journal of Micromechanics and Microengineering, vol. 6, pp. 320-329, 1996.
11. E. M. Yeatman, P. J. Kushner, and D. A. Roberts, Use of scanned detection in optical position encoders, IEEE Transactions on Instrumentation and Measurement, vol. 53, pp. 37-44, 2004.
12. G. K. Fedder, MEMS fabrication, International Test Conference Proceedings, 2003.
13. K. A. Shaw and N. C. MacDonald, Integrating SCREAM micromachined devices with integrated circuits, IEEE, The Ninth Annual International Workshop on MicroElectroMechanicalSystems Proceedings, 1996.