Free-space MEMS tunable optical filter on (110) silicon

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Volumn , Issue , 2005, Pages 73-74

  Lipson, A ^a   Yeatman, E M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; MICROELECTROMECHANICAL DEVICES; OPTICAL COMMUNICATION; SILICON; SUBSTRATES; TUNING; WAVELENGTH DIVISION MULTIPLEXING;

BRAGG MIRROR; CONTROL MECHANISM; TUNABLE OPTICAL FILTERS (TOF); WAVELENGTH FILTERING;

OPTICAL FILTERS;

EID: 33749071820     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2005.1540083     Document Type: Conference Paper

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