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High-efficiency amorphous silicon devices on LPCVD-ZnO TCO prepared in industrial KAI-M R&D reactor
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S. Benagli, D. Borrello, E. Vallat-Sauvain, J. Meier, U. Kroll, J. Hotzel, J. Bailat, J. Steinhauser, M. Marmelo, G. Monteduro, and L. Castens High-efficiency amorphous silicon devices on LPCVD-ZnO TCO prepared in industrial KAI-M R&D reactor Proceedings of the 24th European Photovoltaic Solar Energy Conference 2009 2293 2296
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(2009)
Proceedings of the 24th European Photovoltaic Solar Energy Conference
, pp. 2293-2296
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Benagli, S.1
Borrello, D.2
Vallat-Sauvain, E.3
Meier, J.4
Kroll, U.5
Hotzel, J.6
Bailat, J.7
Steinhauser, J.8
Marmelo, M.9
Monteduro, G.10
Castens, L.11
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