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Volumn 60, Issue 10, 2013, Pages 2175-2188

Thickness design, fabrication, and evaluation of 100-MHz polyurea ultrasonic transducer

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ELECTRODES; B-MODE IMAGING; DEPOSITION EQUIPMENT; EQUIVALENT CIRCUIT MODEL; OUTER LAYER; POLYIMIDE LAYERS; SOUND PRESSURES; UNDER WATER;

EID: 84884793772     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2013.2808     Document Type: Article
Times cited : (3)

References (42)
  • 4
    • 1242310460 scopus 로고    scopus 로고
    • Development of piezoelectric micromachined ultrasonic transducers
    • F. Akasheh, T. Myers, J. D. Fraser, S. Bose, and A. Bandyopadhyay, "Development of piezoelectric micromachined ultrasonic transducers," Sens. Actuators A, vol. 111, no. 2-3, pp. 275-287, 2004.
    • (2004) Sens. Actuators A , vol.111 , Issue.2-3 , pp. 275-287
    • Akasheh, F.1    Myers, T.2    Fraser, J.D.3    Bose, S.4    Bandyopadhyay, A.5
  • 5
    • 78649390004 scopus 로고    scopus 로고
    • Piezoelectric micromachined ultrasound transducer (pMUT) arrays for 3D imaging probes
    • D . E. Dausch, J. B. Castellucci, D. R. Chou, and O. T. von Ramm, "Piezoelectric micromachined ultrasound transducer (pMUT) arrays for 3D imaging probes," in Proc. IEEE Ultrason. Symp., 2006, pp. 930-933.
    • (2006) Proc. IEEE Ultrason. Symp , pp. 930-933
    • Dausch, D.E.1    Castellucci, J.B.2    Chou, D.R.3    Von Ramm, O.T.4
  • 6
    • 0022091542 scopus 로고
    • Performance of a linear array transducer of vinylidene fluoride trifluoroethylene copolymer
    • K. Kimura, N. Hashimoto, and H. Ohigashi, "Performance of a linear array transducer of vinylidene fluoride trifluoroethylene copolymer," IEEE Trans. Sonics Ultrason., vol. 32, no. 4, pp. 566-573, 1985. (Pubitemid 16494459)
    • (1985) IEEE transactions on sonics and ultrasonics , vol.SU-32 , Issue.4 , pp. 566-573
    • Kimura Kuniko1    Hashimoto Nobuo2    Ohigashi Hiroji3
  • 7
    • 21644475127 scopus 로고    scopus 로고
    • PVdF array characterisation for high frequency ultrasonic imaging
    • P2U-R-2, Proceedings - 2004 IEEE Ultrasonics Symposium: A Conference of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Society, UFFC-S
    • S . J. Carey, C. M. Gregory, M. P. Brewin, M. J. Birch, S. Ng, and J. V. Hatfield, "PVdF array characterisation for high frequency ultrasonic imaging," in Proc. IEEE Ultrason. Symp., 2004, pp. 1930-1933. (Pubitemid 40926753)
    • (2004) Proceedings - IEEE Ultrasonics Symposium , vol.3 , pp. 1930-1933
    • Carey, S.J.1    Gregory, C.M.2    Brewin, M.P.3    Birch, M.J.4    Ng, S.5    Hatfield, J.V.6
  • 9
    • 84864662195 scopus 로고    scopus 로고
    • Wideband multimode transducer consisting of c-axis tilted ZnO/c-axis normal ZnO multilayer
    • art. no. 07GC08
    • S . Takayanagi, T. Yanagitani, and M. Matsukawa, "Wideband multimode transducer consisting of c-axis tilted ZnO/c-axis normal ZnO multilayer," Jpn. J. Appl. Phys., vol. 51, no. 7, art. no. 07GC08 2012.
    • (2012) Jpn. J. Appl. Phys , vol.51 , Issue.7
    • Takayanagi, S.1    Yanagitani, T.2    Matsukawa, M.3
  • 12
    • 0029541940 scopus 로고
    • Piezoelectricty of vinylidene cyanide copolymers and their applications
    • I. Seo, "Piezoelectricty of vinylidene cyanide copolymers and their applications," Ferroelectrics, vol. 171, no. 1, pp. 45-55, 1995.
    • (1995) Ferroelectrics , vol.171 , Issue.1 , pp. 45-55
    • Seo, I.1
  • 13
    • 0034316340 scopus 로고    scopus 로고
    • Design considerations for piezoelectric polymer ultrasound transducers
    • L . F. Brown, "Design considerations for piezoelectric polymer ultrasound transducers," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 47, no. 6, pp. 1377-1396, 2000.
    • (2000) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.47 , Issue.6 , pp. 1377-1396
    • Brown, L.F.1
  • 14
    • 0036819248 scopus 로고    scopus 로고
    • Multiple acoustical matching layer design of ultrasonic transducer for medical application
    • Y . C. Chen and S. Wu, "Multiple acoustical matching layer design of ultrasonic transducer for medical application," Jpn. J. Appl. Phys., vol. 41, no. 10, pp. 6098-6107, 2002.
    • (2002) Jpn. J. Appl. Phys , vol.41 , Issue.10 , pp. 6098-6107
    • Chen, Y.C.1    Wu, S.2
  • 15
    • 35948966046 scopus 로고    scopus 로고
    • Characterization and optimization design of the polymer-based capacitive micro-arrayed ultrasonic transducer
    • D . Y. Chiou, M. Y. Chen, M. W. Chang, and H. C. Deng, "Characterization and optimization design of the polymer-based capacitive micro-arrayed ultrasonic transducer," Jpn. J. Appl. Phys., vol. 46, no. 11, pp. 7496-7503, 2007.
    • (2007) Jpn. J. Appl. Phys , vol.46 , Issue.11 , pp. 7496-7503
    • Chiou, D.Y.1    Chen, M.Y.2    Chang, M.W.3    Deng, H.C.4
  • 16
    • 54949139263 scopus 로고    scopus 로고
    • Analysis and design of a flextensional transducer by means of the finite element method
    • Y . Roh and K. Kang, "Analysis and design of a flextensional transducer by means of the finite element method," Jpn. J. Appl. Phys., vol. 47, no. 5, pp. 3997-4002, 2008.
    • (2008) Jpn. J. Appl. Phys , vol.47 , Issue.5 , pp. 3997-4002
    • Roh, Y.1    Kang, K.2
  • 17
    • 54949127190 scopus 로고    scopus 로고
    • Design of an underwater tonpilz transducer with 1-3 piezocomposite materials
    • D . L. Pei and Y. Roh, "Design of an underwater tonpilz transducer with 1-3 piezocomposite materials," Jpn. J. Appl. Phys., vol. 47, no. 5, pp. 4003-4006, 2008.
    • (2008) Jpn. J. Appl. Phys , vol.47 , Issue.5 , pp. 4003-4006
    • Pei, D.L.1    Roh, Y.2
  • 18
    • 0006111106 scopus 로고
    • Piezoelectric properties of thin films of aromatic polyurea prepared by vapor deposition polymerization
    • Y . Takahashi, S. Ukishima, M. Iijima, and E. Fukada, "Piezoelectric properties of thin films of aromatic polyurea prepared by vapor deposition polymerization," J. Appl. Phys., vol. 70, no. 5, pp. 6983-6987, 1991.
    • (1991) J. Appl. Phys , vol.70 , Issue.5 , pp. 6983-6987
    • Takahashi, Y.1    Ukishima, S.2    Iijima, M.3    Fukada, E.4
  • 19
    • 33750818744 scopus 로고
    • Pyroelectricity in poled thin films of aromatic polyurea prepared by vapor deposition polymerization
    • Y . Takahashi, M. Iijima, and E. Fukada, "Pyroelectricity in poled thin films of aromatic polyurea prepared by vapor deposition polymerization," Jpn. J. Appl. Phys., vol. 28, no. 12, pp. 2245-2247, 1989.
    • (1989) Jpn. J. Appl. Phys , vol.28 , Issue.12 , pp. 2245-2247
    • Takahashi, Y.1    Iijima, M.2    Fukada, E.3
  • 21
    • 0029275250 scopus 로고
    • Piezoelectric and dielectric properties of aromatic polyurea synthesized by vapor deposition polymerization
    • X. Wang, Y. Takahashi, M. Iijima, and E. Fukada, "Piezoelectric and dielectric properties of aromatic polyurea synthesized by vapor deposition polymerization," Jpn. J. Appl. Phys., vol. 34, no. 3, pp. 1585-1590, 1995.
    • (1995) Jpn. J. Appl. Phys , vol.34 , Issue.3 , pp. 1585-1590
    • Wang, X.1    Takahashi, Y.2    Iijima, M.3    Fukada, E.4
  • 24
    • 68649090786 scopus 로고    scopus 로고
    • A thin film earphone using polyurea piezoelectric transducer
    • (in Japanese)
    • M. Nakazawa, K. Nakamura, and S. Ueha, "A thin film earphone using polyurea piezoelectric transducer," IEICE Tech. Rep., vol. 106, no. 204, pp. 35-40, 2006 (in Japanese).
    • (2006) IEICE Tech. Rep , vol.106 , Issue.204 , pp. 35-40
    • Nakazawa, M.1    Nakamura, K.2    Ueha, S.3
  • 25
    • 54949113714 scopus 로고    scopus 로고
    • Three-axis acceleration sensor using polyurea films
    • M. Tabaru, M. Nakazawa, K. Nakamura, and S. Ueha, "Three-axis acceleration sensor using polyurea films," Jpn. J. Appl. Phys., vol. 47, no. 5, pp. 4044-4047, 2008.
    • (2008) Jpn. J. Appl. Phys , vol.47 , Issue.5 , pp. 4044-4047
    • Tabaru, M.1    Nakazawa, M.2    Nakamura, K.3    Ueha, S.4
  • 27
    • 77956572051 scopus 로고    scopus 로고
    • Equivalent circuit analysis and design of multilayered polyurea ultrasonic transducers
    • art. no. 07HD05
    • T. Aoyagi, D. Koyama, K. Nakamura, and M. Nakazawa, "Equivalent circuit analysis and design of multilayered polyurea ultrasonic transducers," Jpn. J. Appl. Phys., vol. 49, no. 7, art. no. 07HD05 2010.
    • (2010) Jpn. J. Appl. Phys , vol.49 , Issue.7
    • Aoyagi, T.1    Koyama, D.2    Nakamura, K.3    Nakazawa, M.4
  • 29
    • 68649105284 scopus 로고    scopus 로고
    • Measurement of surface acoustic wave velocity using a variableline-focus polyurea thin-film ultrasonic transducer
    • T. Aoyagi, M. Nakazawa, M. Tabaru, K. Nakamura, and S. Ueha, "Measurement of surface acoustic wave velocity using a variableline-focus polyurea thin-film ultrasonic transducer," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 56, no. 8, pp. 1761-1768, 2009.
    • (2009) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.56 , Issue.8 , pp. 1761-1768
    • Aoyagi, T.1    Nakazawa, M.2    Tabaru, M.3    Nakamura, K.4    Ueha, S.5
  • 31
    • 0015142009 scopus 로고
    • Definitions relating to conversion losses in piezoelectric transducers
    • E. K. Sittig, "Definitions relating to conversion losses in piezoelectric transducers," IEEE Trans. Sonics Ultrason., vol. SU-18, no. 4, pp. 231-234, 1971.
    • (1971) IEEE Trans. Sonics Ultrason. , vol.SU-18 , Issue.4 , pp. 231-234
    • Sittig, E.K.1
  • 33
    • 16344372805 scopus 로고    scopus 로고
    • Chronological Scientific Tables 2005 National Astronomical Observatory, Tokyo, Japan: Maruzen [in Japanese]
    • Chronological Scientific Tables 2005 "Rika Nenpyo". National Astronomical Observatory, Tokyo, Japan: Maruzen, 2004, p. 418, [in Japanese].
    • (2004) Rika Nenpyo , pp. 418
  • 34
    • 0024394809 scopus 로고
    • The design and fabrication of high frequency poly(vinylidene fluoride) transducers
    • DOI 10.1016/0161-7346(89)90001-1
    • M. D. Sherar and F. S. Foster, "The design and fabrication of high frequency poly(vinylidene fluoride) transducers," Ultrason. Imaging, vol. 11, no. 2, pp. 75-94, 1989. (Pubitemid 19138370)
    • (1989) Ultrasonic Imaging , vol.11 , Issue.2 , pp. 75-94
    • Sherar, M.D.1    Foster, F.S.2
  • 35
    • 0028397298 scopus 로고
    • Modeling and optimization of high-frequency ultrasound transducers
    • G. R. Lockwood and F. S. Foster, "Modeling and optimization of high-frequency ultrasound transducers," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 41, no. 2, pp. 225-230, 1994.
    • (1994) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.41 , Issue.2 , pp. 225-230
    • Lockwood, G.R.1    Foster, F.S.2
  • 37
    • 0442326648 scopus 로고    scopus 로고
    • Design of efficient, broadband single-element (20-80 MHz) ultrasonic transducers for medical imaging applications
    • J. M. Cannata, T. A. Ritter, W. Chen, R. H. Silverman, and K. K. Shung, "Design of efficient, broadband single-element (20-80 MHz) ultrasonic transducers for medical imaging applications," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 50, no. 11, pp. 1548-1557, 2003.
    • (2003) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.50 , Issue.11 , pp. 1548-1557
    • Cannata, J.M.1    Ritter, T.A.2    Chen, W.3    Silverman, R.H.4    Shung, K.K.5
  • 40
    • 84884802562 scopus 로고    scopus 로고
    • Cho-onpa binran K. Nakamura, Ed., Tokyo, Japan: Maruzen (in Japanese)
    • H. Ohitachi, Handbook of Ultrasonic Wave "Cho-onpa binran", K. Nakamura, Ed., Tokyo, Japan: Maruzen, 1999, pp. 125-129. (in Japanese)
    • (1999) Handbook of Ultrasonic Wave , pp. 125-129
    • Ohitachi, H.1
  • 41
    • 84908144695 scopus 로고
    • The use of fast Fourier transform for the estimation of power spectra: A method based on time averaging over short, modified periodograms
    • P. D. Welch, "The use of fast Fourier transform for the estimation of power spectra: A method based on time averaging over short, modified periodograms," IEEE Trans. Audio Electroacoust., vol. AU-15, no. 2, pp. 70-73, 1967.
    • (1967) IEEE Trans. Audio Electroacoust. , vol.AU-15 , Issue.2 , pp. 70-73
    • Welch, P.D.1


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