Piezoelectric micromachined ultrasound transducer (pMUT) arrays for 3D imaging probes

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2006, Pages 930-933

  Dausch, David E ^a   Castellucci, John B ^b   Chou, Derrick R ^b   Von Ramm, Olaf T ^b  

^a RTI INTERNATIONAL   (United States)

^b DUKE UNIVERSITY   (United States)

Author keywords

Acoustic devices; Medical imaging; Microelectromechanical systems; Piezoelectric transducers

Indexed keywords

2D ARRAYS; 3D IMAGING; B-MODE IMAGES; BULK-MICROMACHINED; CABLE ASSEMBLIES; COERCIVE VOLTAGES; DEEP REACTIVE ION ETCHING; DRIVE VOLTAGE; DUKE UNIVERSITY; INTRAVASCULAR; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED ULTRASOUND TRANSDUCERS; MODE OPERATION; NEW APPROACHES; PER UNIT; PHASED ARRAYS; PULSE ECHOES; PZT; PZT LAYER; PZT THIN FILM; SILICON SUBSTRATES; TRANSMIT FREQUENCY;

ACOUSTIC DEVICES; ACOUSTIC TRANSDUCERS; ACOUSTOOPTICAL EFFECTS; ANTENNA PHASED ARRAYS; COMPOSITE MICROMECHANICS; ELECTRIC FIELDS; ELECTROACOUSTIC TRANSDUCERS; MECHATRONICS; MEDICAL IMAGING; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; THREE DIMENSIONAL; ULTRASONIC PROPAGATION; ULTRASONIC SCATTERING; ULTRASONIC TRANSDUCERS; ULTRASONICS;

PIEZOELECTRIC TRANSDUCERS;

EID: 78649390004     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2006.248     Document Type: Conference Paper

References (5)

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