Characterization and optimization design of the polymer-based capacitive micro-arrayed ultrasonic transducer

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 11, 2007, Pages 7496-7503

  Chiou, De Yi ^a   Chen, Mu Yueh ^a   Chang, Ming Wei ^a   Deng, Hsu Cheng ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Finite element; Optimization design; Polymer based; Ultrasonic transducer

Indexed keywords

CIRCUIT SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROSTRUCTURE; NATURAL FREQUENCIES;

ELECTROSTATIC-STRUCTURAL COUPLED-FIELD SIMULATIONS; OPTIMIZATION DESIGN; POLYMER-BASED CAPACITIVE MICRO-ARRAYED ULTRASONIC TRANSDUCER (P-CMUT);

ULTRASONIC TRANSDUCERS;

EID: 35948966046     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.7496     Document Type: Article

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