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Applied Surface Science

Volumn 283, Issue , 2013, Pages 924-929

Pulsed laser induced confined vapor deposition for thin layer of dense nanoparticle arrays on various substrates

(3) Lin, Dong a Yang, Yingling a Cheng, Gary J a

a SCHOOL OF INDUSTRIAL ENGINEERING (United States)

Author keywords

Dewetting; Microring; Nanoparticle; Pulsed laser; Thin film; Vapor deposition

Indexed keywords

ALUMINA; ALUMINUM OXIDE; NANOPARTICLES; SILICON ALLOYS; SILICON WAFERS; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

ALUMINA NANOPARTICLE; DE-WETTING; EXPERIMENTAL CONDITIONS; FORMATION MECHANISM; MICRORINGS; NANOPARTICLE ARRAY; SHORT-RANGE ORDERED; SILICON NANO STRUCTURES;

PULSED LASERS;

EID: 84883185265 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2013.07.045 Document Type: Article

Times cited : (8)

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