Wet chemical etching of InP for cleaning applications I. An oxide formation/oxide dissolution model

ECS Journal of Solid State Science and Technology

Volumn 2, Issue 4, 2013, Pages

  Cuypers, D ^a,b   De Gendt, S ^a,b   Arnauts, S ^b   Paulussen, K ^a   Van Dorp, D H ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84881436827     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.020304jss     Document Type: Article

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