Surface ionisation gas detection: Vertical versus planar readout modes

Sensors and Actuators, B: Chemical

Volumn 188, Issue , 2013, Pages 286-292

  Hackner, Angelika ^a   Bouxin, Benoit ^a   Müller, Gerhard ^a  

^a AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

Gas detection; Interdigital electrodes; MEMS; Microheater; Platinum; Surface ionization

Indexed keywords

COUNTER ELECTRODES; DIELECTRIC HEATERS; GAS DETECTION; GAS SENSING DEVICES; INTERDIGITAL ELECTRODE; MICROHEATER; ORDERS OF MAGNITUDE; SURFACE IONIZATION;

CHEMICAL DETECTION; ELECTRODES; GAS DETECTORS; HEATING EQUIPMENT; IONIZATION OF GASES; IONS; MEMS; MICROELECTROMECHANICAL DEVICES; PLATINUM; SENSORS;

GAS SENSING ELECTRODES;

EID: 84881278132     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.06.091     Document Type: Article

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