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Volumn 34, Issue 8, 2013, Pages 960-962

Application of VRS methodology for the statistical assessment of BTI in MG/HK CMOS devices

Author keywords

Bias temperature instability; CMOS devices; high k dielectrics; metal gate; variability; voltage ramp stress (VRS)

Indexed keywords

BIAS TEMPERATURE INSTABILITY; CMOS DEVICES; HIGH-K DIELECTRIC; METAL GATE; VARIABILITY; VOLTAGE RAMP;

EID: 84881002353     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2013.2268050     Document Type: Article
Times cited : (10)

References (9)
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  • 2
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  • 5
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  • 6
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    • Voltage ramp stress for bias temperature instability testing of metal gate/High-k stacks
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    • A. Kerber, S. A. Krishnan, and E. Cartier, "Voltage ramp stress for bias temperature instability testing of metal gate/High-k stacks," IEEE Electron Device Lett., vol. 30, no. 12, pp. 1347-1349, Dec. 2009.
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  • 8
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    • Characterization of fast relaxation during BTI stress in conventional and advanced CMOS devices with HfO2/TiN gate stacks
    • Nov
    • A. Kerber, K. Maitra, A. Majumdar, et al., "Characterization of fast relaxation during BTI stress in conventional and advanced CMOS devices with HfO2/TiN gate stacks," IEEE Trans. Electron Devices, vol. 55, no. 11, pp. 3175-3183, Nov. 2008.
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  • 9
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    • Kerber, A.1    Nigam, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.