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Applied Physics Express

Volumn 6, Issue 6, 2013, Pages

Direct writing of shape-controlled nanodot array by two-photon nanolithography using elliptical beam

(6) Cao, Hong Zhong a,b Zheng, Mei Ling a Dong, Xian Zi a Jin, Feng a Zhao, Zhen Sheng a Duan, Xuan Ming a

a TECHNICAL INSTITUTE OF PHYSICS AND CHEMISTRY (China)

b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT WRITING; ELLIPTICAL BEAMS; FEATURE SIZES; MINOR AXIS; NANO-DOT ARRAYS; PLASMONICS; SHAPE-CONTROLLED; THEORETICAL SIMULATION;

NANOLITHOGRAPHY; PHOTONS; PHOTORESISTS;

NANOSTRUCTURED MATERIALS;

EID: 84880855310 PISSN: 18820778 EISSN: 18820786 Source Type: Journal
DOI: 10.7567/APEX.6.066501 Document Type: Article

Times cited : (6)

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