Influence of gas mixture ratio on properties of SiNx:H films for Crystalline Silicon Solar Cells

Energy Procedia

Volumn 27, Issue , 2012, Pages 419-425

  Lee, K Dong ^a   Dahiwale, S S ^a   Kim, Y Do ^a   Kim, S ^a   Bae, S ^a   Park, S ^a   Tark, S Ju ^a   Kim, D ^a  

^a Korea University   (South Korea)

Author keywords

Field effect; Gas mixture; Optical property; Passivation; Silicon nitride; Silicon solar cells

Indexed keywords

EID: 84879952784     PISSN: 18766102     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.egypro.2012.07.087     Document Type: Conference Paper

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