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Thin Solid Films

Volumn 533, Issue , 2013, Pages 79-82

Interface width evaluation in thin layered CoFeB/MgO multilayers including Ru or Ta buffer layer by X-ray reflectivity

(5) Lamperti, A a Ahn, S M b Ocker, B c Mantovan, R a Ravelosona, D b

a LABORATORIO MDM (Italy)

b CNRS (France)

c Singulus Technologies AG (Germany)

Author keywords

CoFeB MgO; Interface width; Multilayers; Perpendicular magnetic anisotropy; Ru; Ta; X ray reflectivity

Indexed keywords

ANISOTROPIC BEHAVIORS; COFEB/MGO; INTERFACE WIDTHS; PERPENDICULAR MAGNETIC ANISOTROPY; REPRODUCIBILITIES; SPECULAR X-RAY REFLECTIVITIES; TA BUFFER LAYERS; X RAY REFLECTIVITY;

ANNEALING; BUFFER LAYERS; COBALT COMPOUNDS; DIELECTRIC MATERIALS; FILM GROWTH; MAGNETIC ANISOTROPY; RUTHENIUM; TANTALUM; X RAYS;

MULTILAYERS;

EID: 84879888254 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.11.130 Document Type: Conference Paper

Times cited : (17)

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