Mechanism study of Ag catalyzed directional etch of silicon for nanowire formation

ECS Transactions

Volumn 41, Issue 35, 2012, Pages 9-25

  Shao, Ingrid ^a   Gignac, Lynne ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

D. TRANSMISSION ELECTRON MICROSCOPES (TEM); DIRECT OBSERVATIONS; HYDROGEN TRANSPORT; NANOWIRE FORMATION; SILICON DISSOLUTION; SINGLE CRYSTALLINE SILICON; SURFACE PROTECTION; VERTICALLY ALIGNED;

CATALYSIS; ELECTRODEPOSITION; HYDROGEN; METALLIZING; NANOWIRES; SILICON; SILVER; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

SILICON WAFERS;

EID: 84879356093     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3699374     Document Type: Conference Paper

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