Semiconductor fault detection and classification for yield enhancement and manufacturing intelligence

Flexible Services and Manufacturing Journal

Volumn 25, Issue 3, 2013, Pages 367-388

  Chien, Chen Fu ^a   Hsu, Chia Yu ^b   Chen, Pei Nong ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b YUAN ZE UNIVERSITY   (Taiwan)

Author keywords

Data mining; Fault detection and classification (FDC); Manufacturing intelligence; Semiconductor manufacturing; Yield enhancement

Indexed keywords

EMPIRICAL STUDIES; FAULT CLASSIFICATION; FAULT DETECTION AND CLASSIFICATION; MONITORING PROCESS; SEMICONDUCTOR COMPANIES; SEMICONDUCTOR MANUFACTURING; WAFER FABRICATIONS; YIELD ENHANCEMENT;

DATA MINING; INDUSTRY; MANUFACTURE; PRINCIPAL COMPONENT ANALYSIS; PROCESS MONITORING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

FAULT DETECTION;

EID: 84879007805     PISSN: 19366582     EISSN: 19366590     Source Type: Journal    
DOI: 10.1007/s10696-012-9161-4     Document Type: Article

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