LTCC-based fluidic components for chemical applications

International Microelectronics and Packaging Society - 3rd IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2007

Volumn , Issue , 2007, Pages 214-220

  Thelemann, T ^a   Fischer, M ^a   Gross A ^a   Muller J ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

LTCC; Microfluidic; Microreaction system

Indexed keywords

CHEMICAL APPLICATIONS; CHEMICAL CHARACTERIZATION; ELECTRICAL CONNECTION; LOW TEMPERATURE CO-FIRED CERAMICS; LTCC; MICRO FLUIDIC APPLICATIONS; MICROREACTION SYSTEMS; TEMPERATURE RESISTANCES;

CERAMIC MATERIALS; CUTTING; ELECTRIC CONNECTORS; MICROELECTRONICS; MICROSYSTEMS;

MICROFLUIDICS;

EID: 84878227402     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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