SU-8- and PDMS-based hybrid fabrication technology for combination of permanently bonded flexible and rigid features on a single device

Journal of Micromechanics and Microengineering

Volumn 23, Issue 6, 2013, Pages

  Patel, Jasbir N ^a   Gray, Bonnie L ^a   Kaminska, Bozena ^a   Wu, Nien Chen ^a   Gates, Byron D ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CONSISTENT PERFORMANCE; FABRICATION PROCESS; FLEXIBLE MICROFLUIDICS; HYBRID FABRICATION; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CHANNEL; OXYGEN PLASMA TREATMENTS; VOICE COIL ACTUATORS;

ALIGNMENT; BOND STRENGTH (MATERIALS); FABRICATION; FLUIDIC DEVICES; MICROCHANNELS; MICROFLUIDICS; PLASMA APPLICATIONS; POLYMERS;

SILICONES;

EID: 84878043356     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/6/065029     Document Type: Article

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