Rugate-structured free-standing porous silicon-based fiber-optic sensor for the simultaneous detection of pressure and organic gases

Sensors and Actuators, B: Chemical

Volumn 183, Issue , 2013, Pages 428-433

  Cho, So Yeon ^a   Lee, Ki Won ^a   Kim, Jae Wan ^b   Kim, Dong Hyun ^b  

^a Kongju National University   (South Korea)

^b Bugil High School   (South Korea)

Author keywords

Porous silicon; Pressure sensor; Rugate structured free standing porous silicon Lateral pressure difference Fiber optics sensors Photonic bandgap materials Pressure sensitive membrane

Indexed keywords

DIFFERENT PRESSURES; ELASTICITY MODULI; LATERAL PRESSURES; MULTIPLE RESPONSE; POROUS STRUCTURES; PRESSURE SENSITIVE; REFLECTANCE SPECTRUM; SIMULTANEOUS DETECTION;

FIBER OPTIC SENSORS; POROUS SILICON; PRESSURE SENSORS; SENSORS; SIGNAL PROCESSING;

MEMBRANES;

EID: 84877333402     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.04.021     Document Type: Article

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