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Volumn 34, Issue 4, 2009, Pages 643-650

CompoSite Si/PS membrane pressure sensors with micro and macro-porous silicon

Author keywords

MEMS; Porosity; Porous silicon; Pressure sensor

Indexed keywords

FORMATION PARAMETER; MEMBRANE PRESSURE; MICRO AND MACRO; MICROELECTROMECHANICAL SYSTEMS; OFFSET VOLTAGE; PIEZO-RESISTIVE; SINGLE CRYSTALLINE SILICON; STRESS VALUES; STRESS-INDUCED; UNIQUE FEATURES;

EID: 70350553625     PISSN: 02562499     EISSN: 09737677     Source Type: Journal    
DOI: 10.1007/s12046-009-0028-7     Document Type: Article
Times cited : (5)

References (17)
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  • 4
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    • Polysilicon: A versatile material for Microsystems
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  • 5
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    • The physics of Macropore formation in low doped n-type silicon
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    • Lehmann, V.1
  • 8
    • 0038133574 scopus 로고    scopus 로고
    • Macropore formation on p-type silicon
    • Ponamarev E A, Levy Clement C 2000 Macropore formation on p-type silicon. J. Porous Materials (7): 51-56.
    • (2000) J. Porous Materials , Issue.7 , pp. 51-56
    • Ponamarev, E.A.1    Levy, C.C.2
  • 11
    • 0003532560 scopus 로고    scopus 로고
    • Boston/Dordrecht/London: Kluwer Academic Publishers
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    • Senturia, D.1    Stephen2
  • 12
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    • Porous silicon formation mechanisms
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    • Smith, R.L.1    Collins, S.D.2
  • 14
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    • Enhancement in sensitivity of pressure sensors with composite Si/Porous Silicon membrane
    • Sujatha L, Enakshi Bhattacharya 2007 Enhancement in sensitivity of pressure sensors with composite Si/Porous Silicon membrane. J. Micromech. Microeng. 17: p 1605-1610.
    • (2007) J. Micromech. Microeng. , vol.17 , pp. 1605-1610
    • Sujatha, L.1    Enakshi, B.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.