Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors

Applied Physics Letters

Volumn 102, Issue 15, 2013, Pages

  Fan, Linran ^a   Sun, Xi'Ankai ^a   Xiong, Chi ^a   Schuck, Carsten ^a   Tang, Hong X ^a  

^a Yale University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE (ALN); BAND STRUCTURE ENGINEERING; CAVITY OPTOMECHANICS; CRYSTAL NANOCAVITIES; EFFECTIVE COUPLING; HIGH QUALITY FACTORS; PHOTONIC CRYSTAL NANOCAVITY; PIEZOELECTRIC ACTUATION;

ALUMINUM NITRIDE;

PHOTONIC CRYSTALS;

EID: 84877135979     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4802250     Document Type: Article

References (23)

1. K. H. Lee, T. G. McRae, G. I. Harris, J. Knittel, and W. P. Bowen, Phys. Rev. Lett. 104, 123604 (2010). 10.1103/PhysRevLett.104.123604
2. S. Sridaran and S. A. Bhave, Opt. Express 19, 9020 (2011). 10.1364/OE.19.009020
3. X. K. Sun, X. F. Zhang, M. Poot, C. Xiong, and H. X. Tang, Appl. Phys. Lett. 101, 221116 (2012). 10.1063/1.4769045
4. M. Davanço, J. Chan, A. H. Safavi-Naeini, O. Painter, and K. Srinivasan, Opt. Express 20, 24394 (2012). 10.1364/OE.20.024394
5. M. Winger, T. D. Blasius, T. P. M. Alegre, A. H. Safavi-Naeini, S. Meenehan, J. Cohen, S. Stobbe, and O. Painter, Opt. Express 19, 24905 (2011). 10.1364/OE.19.024905
6. H. Miao, K. Srinivasan, and V. Aksyuk, New J. Phys. 14, 075015 (2012). 10.1088/1367-2630/14/7/075015
7. M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, Nature 462, 78 (2009). 10.1038/nature08524
8. X. K. Sun, J. J. Zheng, M. Poot, C. W. Wong, and H. X. Tang, Nano Lett. 12, 2299 (2012). 10.1021/nl300142t
9. X. K. Sun, X. F. Zhang, and H. X. Tang, Appl. Phys. Lett. 100, 173116 (2012). 10.1063/1.4709416
10. T. J. Kippenberg and V. J. Vahala, Science 321, 1172 (2008). 10.1126/science.1156032
11. J. Chan, A. H. Safavi-Naeini, J. T. Hill, S. Meenehan, and O. Painter, Appl. Phys. Lett. 101, 081115 (2012). 10.1063/1.4747726
12. R. Besson, in 31st Annual Freq. Control Symp. (1977), p. 147.
13. C. Xiong, L. Fan, X. Sun, and H. X. Tang, Appl. Phys. Lett. 102, 021110 (2013). 10.1063/1.4788724
14. W. H. P. Pernice, C. Xiong, C. Schuck, and H. X. Tang, Appl. Phys. Lett. 100, 091105 (2012). 10.1063/1.3690888
15. Q. Quan and M. Loncar, Opt. Express 19, 18529 (2011). 10.1364/OE.19.018529
16. T. P. M. Alegre, A. Safavi Naeini, M. Winger, and O. Painter, Opt. Express 19, 5658 (2011). 10.1364/OE.19.005658
17. I. H. Kim and S. H. Kim, J. Vac. Sci. Technol. A 13, 2814 (1995). 10.1116/1.579710
18. K. Vahala and A. Yariv, IEEE J. Quantum Electron. 19, 1102 (1983). 10.1109/JQE.1983.1071984
19. E. W. Lemmon, CRC Handbook of Chemistry and Physics, 93rd ed. (2012), pp. 6-164.
20. X. K. Sun, X. F. Zhang, C. Schuck, and H. X. Tang, Sci. Rep. 3, 1436 (2013) 10.1038/srep01436.
21. J. Komma, C. Schwarz, G. Hofmann, D. Heinert, and R. Nawrodt, Appl. Phys. Lett. 101, 041905 (2012). 10.1063/1.4738989
22. N. Watanabe, T. Kimoto, and J. Suda, J. Appl. Phys. 104, 106101 (2008). 10.1063/1.3021148
23. Q. P. Unterreithmeier, E. M. Wei, and J. P. Kotthaus, Nature 458, 1001 (2009). 10.1038/nature07932