Realization of tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process

Applied Physics Letters

Volumn 102, Issue 16, 2013, Pages

  Liu, Sheng ^a   Ihlefeld, Jon F ^a   Dominguez, Jason ^a   Gonzales, Edward F ^a   Eric Bower, John ^a   Bruce Burckel, D ^a   Sinclair, Michael B ^a   Brener, Igal ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DIPOLE RESONANCE; ELECTRIC RESONANCE; NEGATIVE REFRACTIVE INDEX MATERIALS; OPTICAL METAMATERIALS; RESONANT WAVELENGTHS; RESONATOR DIMENSION; SPECTRAL OVERLAP; THERMAL INFRARED;

DIELECTRIC DEVICES; METAMATERIALS; OPTICAL MATERIALS; RESONATORS; TELLURIUM; TELLURIUM COMPOUNDS;

DEPOSITION;

EID: 84876962607     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4803019     Document Type: Article

References (25)

1. D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, Science 305, 788 (2004). 10.1126/science.1096796 (Pubitemid 39038401)
2. N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008). 10.1103/PhysRevLett.100.207402 (Pubitemid 351725958)
3. V. M. Shalaev, Nat. Photonics 1, 41 (2007). 10.1038/nphoton.2006.49
4. C. M. Soukoulis, S. Linden, and M. Wegener, Science 315, 47 (2007). 10.1126/science.1136481 (Pubitemid 46196966)
5. D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006). 10.1126/science.1133628 (Pubitemid 44749939)
6. J. B. Pendry, Phys. Rev. Lett. 85, 3966 (2000). 10.1103/PhysRevLett.85. 3966 (Pubitemid 32027228)
7. J. B. Pendry, A. J. Holden, D. J. Robbins, and W. J. Stewart, IEEE Trans. Microwave Theory Tech. 47, 2075 (1999). 10.1109/22.798002
8. D. B. Burckel, J. R. Wendt, G. A. Ten Eyck, J. C. Ginn, A. R. Ellis, I. Brener, and M. B. Sinclair, Adv. Mater. 22, 5053 (2010). 10.1002/adma.201002429
9. L. Lewin, Proc. Inst. Electr. Eng. 94, 65 (1947).
10. C. L. Holloway, E. F. Kuester, J. Baker-Jarvis, and P. Kabos, IEEE Trans. Antennas Propag. 51, 2596 (2003). 10.1109/TAP.2003.817563
11. Q. Zhao, B. Du, L. Kang, H. Zhao, Q. Xie, B. Li, X. Zhang, J. Zhou, L. Li, and Y. Meng, Appl. Phys. Lett. 92, 051106 (2008). 10.1063/1.2841811 (Pubitemid 351229969)
12. Q. Zhao, L. Kang, B. Du, H. Zhao, Q. Xie, X. Huang, B. Li, J. Zhou, and L. Li, Phys. Rev. Lett. 101, 027402 (2008). 10.1103/PhysRevLett.101.027402
13. Q. Zhao, J. Zhou, F. Zhang, and D. Lippens, Mater. Today 12, 60 (2009). 10.1016/S1369-7021(09)70318-9
14. L. Peng, L. Ran, H. Chen, H. Zhang, J. A. Kong, and T. M. Grzegorczyk, Phys. Rev. Lett. 98, 157403 (2007). 10.1103/PhysRevLett.98.157403 (Pubitemid 46582690)
15. J. C. Ginn, I. Brener, D. W. Peters, J. R. Wendt, J. O. Stevens, P. F. Hines, L. I. Basilio, L. K. Warne, J. F. Ihlefeld, P. G. Clem, and M. B. Sinclair, Phys. Rev. Lett. 108, 097402 (2012). 10.1103/PhysRevLett.108.097402
16. A. B. Evlyukhin, S. M. Novikov, U. Zywietz, R. L. Eriksen, C. Reinhardt, S. I. Bozhevolnyi, and B. N. Chichkov, Nano Lett. 12, 3749 (2012). 10.1021/nl301594s
17. A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Lukyanchuk, Sci. Rep. 2, 492 (2012) 10.1038/srep00492.
18. Y. Fink, J. N. Winn, S. Fan, C. Chen, J. Michel, J. D. Joannopoulos, and E. L. Thomas, Science 282, 1679 (1998). 10.1126/science.282.5394.1679
19. P. Spinelli, M. A. Verschuuren, and A. Polman, Nat. Commun. 3, 692 (2012). 10.1038/ncomms1691
20. R. W. Dutton and R. S. Muller, Thin Solid Films 11, 229 (1972). 10.1016/0040-6090(72)90048-X
21. G. H. Wang, P. P. Chen, Z. Y. Wang, M. Han, J. W. Fang, and S. Y. Zhang, Thin Solid Films 375, 33 (2000). 10.1016/S0040-6090(00)01175-5 (Pubitemid 32030386)
22. V. Bhandarkar, S. Sen, K. P. Muthe, M. Kaur, M. S. Kumar, S. K. Deshpande, S. K. Gupta, J. V. Yakhmi, and V. C. Sahni, Mater. Sci. Eng., B 131, 156 (2006). 10.1016/j.mseb.2006.04.017 (Pubitemid 44026458)
23. Lumerical Solutions, Inc.
24. C. M. Soukoulis and M. Wegener, Nat. Photonics 5, 523 (2011). 10.1038/nphoton.2011.154
25. J. A. Schuller, R. Zia, T. Taubner, and M. L. Brongersma, Phys. Rev. Lett. 99, 107401 (2007). 10.1103/PhysRevLett.99.107401 (Pubitemid 47388573)