Structure and dielectric properties of barium titanate thin films for capacitor applications

Ceramics International

Volumn 39, Issue SUPPL.1, 2013, Pages

  He, Fan ^a   Ren, Wei ^a   Liang, Guanghua ^a   Shi, Peng ^a   Wu, Xiaoqing ^a   Chen, Xiaofeng ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

A. Films; C. Dielectric properties; D. BaTiO3; E. Capacitors

Indexed keywords

BARIUM TITANATE THIN FILMS; BATIO; E. CAPACITORS; MULTILAYER CERAMIC CAPACITORS; PREFERENTIAL ORIENTATION; RELATIVE PERMITTIVITY; RF-MAGNETRON SPUTTERING; TETRAGONAL PEROVSKITES;

BARIUM COMPOUNDS; CERAMIC CAPACITORS; DEPOSITS; FERROELECTRIC MATERIALS; FILM PREPARATION; MAGNETRON SPUTTERING; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

PERMITTIVITY;

EID: 84875695830     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2012.10.118     Document Type: Conference Paper

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