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Volumn 182, Issue , 2013, Pages 45-52

Gas sensing using polymer-functionalized deformable Fabry-Perot interferometers

Author keywords

Fabry Perot interferomer; Gas sensing; Polymer swelling; Silicon micromachining; Volatile organic compound

Indexed keywords

ANALYTE CONCENTRATION; CHEMICAL VAPOR SENSORS; FABRY-PEROT; FINITE ELEMENT SIMULATIONS; GAS SENSING; POLYDIMETHYLSILOXANE POLYMERS; POLYMER SWELLING; SILICON MICROMACHINING;

EID: 84875533454     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.02.016     Document Type: Article
Times cited : (48)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.