Comparison of f-Q scaling in wineglass and radial modes in ring resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2013, Pages 777-780

  Tallur, Siddharth ^a   Bhave, Sunil A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY-SCALING; HIGHER HARMONICS; LOW PHASE NOISE; MEMS OSCILLATORS; ROOM TEMPERATURE; SILICON RESONATORS; THERMOELASTIC DAMPING; TRANSMISSION MEASUREMENTS;

OPTICAL RESONATORS;

MEMS;

EID: 84875472644     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2013.6474358     Document Type: Conference Paper

References (13)

1. W. -T. Hsu, and K. Cioffi, "Low Phase-Noise 70MHz Micromechanical Oscillators," Digest IMS, June 2004, pp. 1927-1930.
2. R. Melamud, P.M. Hagelin, C.M. Arft, C. Grosjean, N. Arumugam, P. Gupta, G. Hill, M. Lutz, A. Partridge, and F. Assaderaghi, "MEMS enables oscillators with sub-ppm frequency stability and sub-ps jitter," Proc. Hilton Head 2012, pp. 66-69.
3. A. K. Samarao, and F. Ayazi, "Combined capacitive and piezoelectric transduction for high performance silicon microresonators," Proc. MEMS 2011, pp. 169-172.
4. L. -W. Hung, and C. -T. C. Nguyen, "Capacitive-piezoelectric AlN resonators with Q>12, 000," Proc. MEMS 2011, pp. 173-176.
5. T. O. Rocheleau, T. L. Naing, Z. Ren, and C. -T. C. Nguyen, "Acoustic whispering gallery mode resonator with Q>109, 000 at 515MHz," Proc. MEMS 2012, pp. 672-675.
6. E. Hwang, A. Driscoll, and S. A. Bhave, "Platform for JFET-based sensing of RF MEMS resonators in CMOS technology," Proc. IEDM 2011, Washington, DC, pp. 489-492.
7. S. Sridaran, and S. A. Bhave, "Opto-acoustic oscillator using silicon MEMS optical modulator," Proc. Transducers 2011, pp. 2920-2923.
8. Z. Hao, S. Pourkamali, and F. Ayazi, "VHF single crystal silicon elliptic bulk-mode capacitive disk resonators: part I: design and modeling," IEEE JMEMS, 13(6), pp. 1043-1053, (2004).
9. Xie Y., "Micromechanical extensional wine-glass mode ring resonators for wireless communications," Ph. D. thesis, U. Mich. 2006, pp. 25-30.
10. M. I. Cheema, and A. G. Kirk, "Implementation of the perfectly matched layer to determine the quality factor of axisymmetric resonators in COMSOL," COMSOL conference, Boston, Oct 2010.
11. S. Tallur, and S. A. Bhave, "Electro-mechanically induced GHz rate optical frequency modulation in silicon," IEEE Photonics Journal 4(5), pp. 1474-1483 (2012).
12. M. Ziaei-Moayyed, E. P. Quévy, J. Hsieh, and R. T. Howe, "Efficient internal electrostatic transduction of the 41st radial mode of a ring resonator," Proc. MEMS 2010, pp. 711-714.
13. R. Tabrizian, M. Rais-Zadeh, and F. Ayazi, "Effect of phonon interactions on limiting the f. Q product of micromechanical resonators," Proc. Transducers 2009, pp. 2131-2134.