High Q and low resonant frequency micro electret energy harvester for harvesting low amplitude harmonic of vibration

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2013, Pages 837-840

  Liu, S W ^a   Miao, J M ^a   Lye, S W ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CONVENTIONAL POLYMERS; DEVICE DESIGN; DEVICE TESTING; ELECTRET MATERIALS; ENERGY HARVESTER; HIGH QUALITY FACTORS; HIGH SPRING CONSTANT; RESONANT SYSTEMS;

ELECTRETS; HARVESTING; MEMS;

NATURAL FREQUENCIES;

EID: 84875467829     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2013.6474373     Document Type: Conference Paper

References (6)

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2. Y. Suzuki, "Recent Progress in MEMS Electret Generator for Energy Harvesting", Ieej Transactions on Electrical and Electronic Engineering, vol 6, pp. 101-111, 2011
3. Y. Suzuki, D. Miki, M. Edamoto, M. Honzumi, "A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications". J. Micromech. Microeng, vol. 20, 2010.
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5. S.W. Liu, S.W. Lye, and J.M. Miao. "Sandwich structured electrostatic/electrets parallel-plate power generator for low acceleration and low frequency vibration energy harvesting". in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, Jan29-Feb2, 2012. pp. 1277-1280.
6. A. G. P. Kottapalli, C. W., Tan, M. Olfatnia, J. M., Miao, G. Barbastathis, and M. Triantafyllou, "A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications", J. Micromech. Microeng., vol. 21, 2011.