Water adsorbate mediated accumulation gas sensing at hydrogenated diamond surfaces

Sensors and Actuators, B: Chemical

Volumn 181, Issue , 2013, Pages 894-903

  Beer, Sebastian ^a   Helwig, Andreas ^a   Müller, Gerhard ^a   Garrido, Jose ^b   Stutzmann, Martin ^b  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b WALTER SCHOTTKY INSTITUT   (Germany)

Author keywords

Accumulation; Adsorbed water; Diamond; Electrolytic dissociation; Gas sensor; Integration

Indexed keywords

ACCUMULATION; ACID-BASE REACTIONS; ADSORBATE LAYERS; ADSORBED WATER; ATMOSPHERIC CONDITIONS; ELECTROLYTIC DISSOCIATION; HYDROGENATED DIAMOND; ROOM TEMPERATURE;

ADSORBATES; CHEMICAL SENSORS; DIAMONDS; GAS DETECTORS; HYDROGENATION; INTEGRATION; SENSORS;

GASES;

EID: 84875466075     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.02.072     Document Type: Article

References (27)

1. D.E. Williams Conduction and gas response of semiconductor gas sensors P.T. Mosley, Solid State Gas Sensors 1987 Adam Hilger Bristol 71 123
2. K. Ihokura, and J. Watson The Stannic Oxide Gas Sensor-Principles and Applications 1994 CRC Press Boca Raton
3. N. Barsan, and U. Weimar Conduction model of metal oxide gas sensors Journal of Electroceramics 7 2001 143 167 (Pubitemid 34288261)
4. Noboru Yamazoe, and Kengo Shimanoe Receptor function and response of semiconductor gas sensor Journal of Sensors 2009 2009 10.1155/2009/875704 Article ID 875704
5. A. Helwig, G. Müller, M. Eickhoff, and G. Sberveglieri Dissociative gas sensing at metal oxide surfaces IEEE Sensors Journal 7 2007 1675 1679
6. M. Tanielian, M. Chatani, H. Fritzsche, V. Smid, and P.D. Persans Effect of adsorbates and insulating layers on the conductance of plasma deposited a-Si:H Journal of Non-Crystalline Solids 35/36 1980 575 580 (Pubitemid 10470293)
7. M. Tanielian Adsorbate effects on the electrical conductance of a-Si:H Philosophical Magazine B45 1982 435 462 (Pubitemid 12557646)
8. A. Helwig, G. Müller, G. Sberveglieri, and G. Faglia Gas sensing properties of hydrogenated amorphous silicon films IEEE Sensors Journal 7 2007 1506 1512
9. M.I. Landstrass, and K.V. Ravi Hydrogen passivation of electrically active defects in diamond Applied Physics Letters 55 1989 1391 1393
10. T. Maki, S. Shikama, M. Komori, Y. Sakaguchi, K. Sakuta, and T. Kobayashi Hydrogenating effect of single-crystal diamond surface Japanese Journal of Applied Physics 31 1992 L1446 L1449
11. A. Hokazono, and H. Kawarada Enhancement/depletion surface channel field effect transistors of diamond and their logic circuits Japanese Journal of Applied Physics 36 1997 7133 7139
12. K. Hayashi, S. Yamanaka, H. Okushi, and K. Kajimura Study of the effect of hydrogen on transport properties in chemical vapour deposited diamond films by Hall measurements Applied Physics Letters 68 1996 376 378 (Pubitemid 126683732)
13. F. Maier, M. Riedel, B. Mantel, J. Ristein, and L. Ley Origin of surface conductivity in diamond Physical Review Letters 85 2000 3472
14. A. Helwig, G. Müller, O. Weidemann, A. Härtl, J.A. Garrido, and M. Eickhoff Gas sensing interactions at hydrogenated diamond surfaces IEEE Sensors Journal 7 2007 1349 1353
15. A. Helwig, G. Müller, J.A. Garrido, and M. Eickhoff Gas sensing properties of hydrogen-terminated diamond Sensors and Actuators B: Chemical 133 2008 156 216
16. Q. Wang, S.L. Qu, S.Y. Fu, W.J. Liu, J.J. Li, and C.Z. Gu Chemical gases sensing properties of diamond nanocone arrays formed by plasma etching Journal of Applied Physics 102 2007 103714 103724
17. A. Kromka, M. Davydova, B. Rezek, M. Vanecek, M. Stuchlik, P. Exnar, and M. Kalbac Gas sensing properties of nanocrystalline diamond films Diamond and Related Materials 19 2010 196 200
18. M. Davydova, M. Stuchlik, B. Rezek, and A. Kromka Temperature enhanced gas sensing properties of diamond films Vacuum 86 2012 599 602
19. A. Helwig, G. Müller, G. Sberveglieri, and M. Eickhoff On the low-temperature response of semiconductor gas sensors Journal of Sensors 2009 2009 10.1155/2009/620720 Article ID 620720
20. J.A. Garrido, A. Härtl, S. Kuch, and M. Stutzmann pH sensors based on hydrogenated diamond surfaces Applied Physics Letters 86 2005 073504
21. x sensor: measuring both the accumulated amount and instantaneous level at low concentrations Sensors 12 2012 2831 2850 doi:10.3390/s120302831
22. A. Helwig, S. Beer, G. Müller, Breathing mode gas detection, Sensors and Actuators B, http://dx.doi.org/10.1016/j.snb.2012.07.088, in press.
23. http://depts.washington.edu/eooptic/links/acidstrength.html.
24. http://www.semiconductors.co.uk.
25. Volpe Pierre-Nicolas, Pernot Julien, Muret Pierre, and Omnès Franck High hole mobility in boron doped diamond for power device applications Applied Physics Letters 94 2009 092102 http://dx.doi.org/10.1063/1.3086397
26. 2 gas sensors as determined by the moving gas outlet technique Sensors and Actuators B126 2007 174 180 (Pubitemid 47374470)
27. Eq. (A7) contains an Arrhenius-type approximation to tabulated water vapour pressure data: http://www.engineeringtoolbox.com/water-vapor-saturation- pressure-d-599.html.