Thin-film gas sensors operating in a perpendicular current mode

Sensors and Actuators, B: Chemical

Volumn 181, Issue , 2013, Pages 932-937

  Ishikawa, Yurie ^a   Hara, Kazuhiro ^a  

^a TOKYO DENKI UNIVERSITY   (Japan)

Author keywords

Cracks; Hydrogen sensor; Metal oxide; Perpendicular current mode; Thin film; WO3

Indexed keywords

CONTRACTION AND EXPANSION; CURRENT MODE; HIGH-TEMPERATURE ANNEALING; HYDROGEN SENSOR; METAL OXIDES; THERMAL EXPANSION COEFFICIENTS; THIN-FILM GAS SENSORS; WO3;

CATALYST SELECTIVITY; CHEMICAL SENSORS; DEPOSITS; HYDROGEN; PLATINUM; SINTERING; THERMAL EXPANSION; THIN FILMS;

CRACKS;

EID: 84875462038     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.02.069     Document Type: Article

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