Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations

Sensors and Actuators, A: Physical

Volumn 195, Issue , 2013, Pages 32-37

  Heidrich, Nicola ^a   Knöbber, Fabian ^a,b   Polyakov, Vladimir ^a   Cimalla, Volker ^a   Pletschen, Wilfried ^a   Sah, Ram Ekwal ^a   Kirste, Lutz ^a   Leopold, Steffen ^c   Hampl, Stefan ^c   Ambacher, Oliver ^a,b   Lebedev, Vadim ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

^c ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Aluminium nitride; Energy harvesting; MEMS

Indexed keywords

CORRUGATED MEMBRANES; HIGH DAMPING; LOW REPETITION RATE; MECHANICAL IMPACTS; NON-RESONANT SYSTEMS; PIEZOELECTRIC MEMBRANES; RESONANT DEVICE; SYSTEM PROPERTY;

ALUMINUM; ALUMINUM NITRIDE; ENERGY HARVESTING; HARVESTERS; MEMS; NITRIDES; PIEZOELECTRICITY;

PIEZOELECTRICITY; ENERGY HARVESTING;

EID: 84875419883     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.02.001     Document Type: Article

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