A fully integrated microbattery for an implantable microelectromechanical system

Journal of Power Sources

Volumn 185, Issue 2, 2008, Pages 1524-1532

  Albano, F ^a   Lin, Y S ^a   Blaauw, D ^a   Sylvester, D M ^a   Wise, K D ^a   Sastry, A M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Implantable; Integrated; MEMS; Microbattery; POWER; PVD; Thin film

Indexed keywords

DEPOSITION; ELECTRIC BATTERIES; ELECTROMECHANICAL DEVICES; FABRICATION; IMPLANTS (SURGICAL); MEMS; PHYSICAL VAPOR DEPOSITION; SECONDARY BATTERIES; SUBSTRATES; THIN FILMS;

DEVICE ARCHITECTURES; FABRICATION TECHNIQUE; IMPLANTABLE; IMPLANTABLE DEVICES; INTEGRATED; MICROBATTERY; POWER; WIRELESS INTEGRATED MICROSYSTEMS;

MINIATURE BATTERIES;

EID: 56049089350     PISSN: 03787753     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpowsour.2008.08.061     Document Type: Article

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