GaAs clean up studied with synchrotron radiation photoemission

IOP Conference Series: Materials Science and Engineering

Volumn 41, Issue 1, 2012, Pages

  Tallarida, Massimo ^a   Adelmann, Christoph ^b   Delabie, Annelies ^b   Elshocht, Sven Van ^b   Caymax, Matty ^b   Schmeisser, Dieter ^a  

^a BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL CHANGE; CHEMICAL COMPOSITIONS; DENSITY OF DEFECTS; GAAS; GAAS SURFACES; INCIDENT PHOTON ENERGY; NATIVE OXIDES; OXYGEN SOURCES; SURFACES AND INTERFACES; SYNCHROTRON RADIATION PHOTOEMISSION; SYNCHROTRON RADIATION PHOTOEMISSION SPECTROSCOPY;

ADSORPTION; ATOMIC LAYER DEPOSITION; ELECTRONIC PROPERTIES; GALLIUM ARSENIDE; INTERFACES (MATERIALS); MICROELECTRONICS; SEMICONDUCTING GALLIUM; SILICON; SYNCHROTRON RADIATION;

SURFACES;

EID: 84874542014     PISSN: 17578981     EISSN: 1757899X     Source Type: Conference Proceeding    
DOI: 10.1088/1757-899X/41/1/012003     Document Type: Conference Paper

References (12)

1. Int Technol Roadmap for Semiconductors 2007 edn for «Emerging Research Devices» at http://www.itrs.net/Links/2007ITRS/Home2007.htm
2. Richard S, Aniel F and Fishman G 2004 Phys. Rev. B 70 235204 (Pubitemid 40270746)
3. Belabbes A, Zaoui A and Ferhat M 2007 Materials Sci. Eng. B 137 210 (Pubitemid 46210140)
4. Hasegawa H, Akazawa M, Domanowska A, Adamowicz B 2010 Appl. Surf. Sci. 256 5698
5. Ye PD, Wilk GD, Yang B, Kwo J, Chu SNG, Nakahara S, Gossmann HJL, Mannaerts JP, Hong M, Ng KK and Bude J 2003 Appl. Phys. Lett. 83 180
6. Frank M, Wilk GD, Starodub D and Gustafsson T 2005 Appl. Phys. Lett. 86 152914
7. Hinkle CL, Sonnet AM, Vogel EM, Mcdonnell S, Hughes GJ, Milojevic M, Lee B, Aguirre-Tostado FS, Choi KJ, Kim HC, Kim J and Wallace RM 2008 Appl. Phys. Lett. 92 071911
8. Tallarida M, Adelmann C, Delabie A, Van Elshocht S, Caymax M and Schmeisser D 2011 Appl. Phys. Lett. 99 042916
9. Tallarida M, Weisheit M, Kolanek K, Michling M, Engelmann HJ and Schmeisser D 2011 J. Nanopart. Res. 13 5975
10. Tanuma S, Powell CJ and Penn DR 1994 Surf. Interf. Anal. 21 165
11. Coulson CA, Rèdei LB and Stocker D 1962 Proceedings of the R. Society London. Ser. A, Math. Phys. Sci. 270 357
12. Klejna S, Elliott SD 2012 J. Phys. Chem. C 116 643