A capacitive relative humidity sensor using polymer nanoparticles

Proceedings of IEEE Sensors

Volumn , Issue , 2012, Pages

  Wang, Yifan ^a   Hajhashemi, M S ^a   Bahreyni, Behraad ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSPRAYING; FABRICATION COST; POLYMER NANOPARTICLES; SENSOR DESIGNS; SIMPLE STRUCTURES; SPIN-ON; UNIFORM FILMS;

DEPOSITS; NANOPARTICLES; POLYIMIDES;

HUMIDITY SENSORS;

EID: 84873966674     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2012.6411213     Document Type: Conference Paper

References (10)

1. C.Y. Lee, C.H. Lin, L.M. Fu, "Techniques in MEMS devices for micro humidity sensors and their appliactions", in MEMS/NEMS, C.T. Leondes, Ed., Springer US, 2006, pp. 1055-1084.
2. Z.M. Rittersma, "Recent achievements in miniaturised humidity sensors - a review of transduction techniques", Sensors and Actuators A: Physical, vol. 96, Issues 2-3, pp.196-210, February 2002.
3. Z. Chen, and C. Lu, "Humidity sensors: a review of materials and mechanisms", Sensor letters, vol. 3, pp.274-295, July 2005.
4. R. Fenner, and E. Zdankiewicz, "Micromachined water vapor sensors: a review of sensing technologies", IEEE Sensors Journal, vol. 1, pp. 309-317, December 2001.
5. L. Gu, Q.A. Huang, and M. Qin, "A novel capacitive-type humidity sensor using CMOS fabrication technology", Sensors and Actuators B: Chemical, vol. 99, Issues 2-3, pp. 491-498, May 2004.
6. Y.L. Yang, L.H. Lo, I.Y. Huang, H.J.H. Chen, W.S. Huang, and S.R.S. Huang, "Improvement of polyimide capacitive humidity sesnor by reactive ion etching and novel electrode design", Proceedings of IEEE Sensors Conference, vol. 1, pp. 511-514, 2002.
7. L. Juhasz, A. Vass-Varnai, V. Timar-Horvath, M.P.Y. Desmulliez, and R.S. Dhariwal, "Porous alumina based capacitive MEMS RH sensor", Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. Symposium on, pp. 381-385, April 2008.
8. J.H. Kim, S.M. Hong, J.S. Lee, B.M. Moon, and K. Kim, "High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology", 4th IEEE Int. Conference on Nano/Micro Engineered and Molecular Systems, pp. 703-706, 2009.
9. D.D.L. Chung, Materials for Electronic Packaging, Elsevier, 1995
10. F. Li, and P. Sarah, "Effect of nanoparticles on protein folding and fibrillogenesis", International Journal of Molecular Sciences, vol. 10, pp. 646-655, 2009.