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Journal of Physics D: Applied Physics

Volumn 46, Issue 8, 2013, Pages

Flow curve determination on dc-MS and HPPMS CrAlN coatings

(4) Bobzin, K a Bagcivan, N a Theiss S a Perne, J a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL METHOD; CHEMICAL COMPOSITIONS; CHROMIUM ALUMINUM NITRIDE COATING; COATING FLOW; DIRECT CURRENT; FEM SIMULATIONS; FINITE ELEMENT SIMULATIONS; FLOW CURVES; HIGH POWER PULSED MAGNETRON SPUTTERING; NANOINDENTATION TECHNIQUES; PHASE APPEARANCE; PHYSICAL VAPOUR DEPOSITION; SPHERICAL INDENTERS; SUBSTRATE MATERIAL; THIN COATING;

ALUMINUM NITRIDE; FINITE ELEMENT METHOD;

COATINGS;

EID: 84873911949 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/46/8/084006 Document Type: Article

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.