Study of processes in a pulsed magnetron Ar/O2 plasma by mass spectrometry

35th EPS Conference on Plasma Physics 2008, EPS 2008 - Europhysics Conference Abstracts

Volumn 32, Issue 3, 2008, Pages 2186-2189

  Pokorny P ^a   Novotny M ^a   Bulir J ^a   Lancok J ^a   Misina M ^a   Musil, J ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

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[No Author keywords available]

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EID: 84873031056     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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7. J.Rosen, S.Mraz, U.Kreissig, D.Music and J.M.Schneider, Effect of Ion Energy on Structure and Composition of Cathodic ArcDeposited Alumina Thin Fims,Plasma Chemistrz and Plasma Processing, 25, 4 (2005), p. 303
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