Surface topography effects in C60 bombardment of Si

Surface and Interface Analysis

Volumn 45, Issue 1, 2013, Pages 93-96

  Cook, Edward L ^a   Krantzman, Kristin D ^a   Garrison, Barbara J ^b  

^a Department of Teacher Education and Department of Sociology and Anthropology   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

C60+; carbon; dynamics SIMS; molecular dynamics simulations; silicon

Indexed keywords

C60+; CARBON ATOMS; FLUENCES; IMPACT POINT; LOCAL REGION; LOCAL TOPOGRAPHY; MOLECULAR DYNAMICS SIMULATIONS; MULTI-IMPACT; NORMAL INCIDENCE; PROJECTILE IMPACT; ROOT MEAN SQUARE ROUGHNESS; SPUTTERED ATOMS; SURFACE HEIGHT;

CARBON; MOLECULAR DYNAMICS; SILICON;

PROJECTILES;

EID: 84872860217     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.4965     Document Type: Conference Paper

References (18)

1. B. J. Garrison, Z. Postawa, Mass Spectrom. Rev. 2008, 27, 289.
2. A. Fahey, G. Gillen, P. Chi, C. Mahoney, App. Surf. Sci. 2006, 252, 7312.
3. A. Wucher, J. Cheng, N. Winograd, Anal. Chem. 2007, 79, 5529.
4. J. S. Fletcher, J. C. Vickerman, Anal. Bioanal. Chem. 2010, 396, 85.
5. A. Delcorte, App. Surf. Sci. 2008, 255, 954.
6. M. F. Russo, Z. Postawa, B. J. Garrison, J. Phys. Chem. C 2009, 113, 3270.
7. K. D. Krantzman, A. Wucher, J. Phys. Chem. C 2010, 114, 5480.
8. K. D. Krantzman, B. J. Garrison, Surf. Interface Anal. 2011, 43, 123.
9. G. Gillen, J. Batteas, C A. Michaels, P. Chi, J. Small, E. Windsor, A. Fahey, J. Verkouteren, K. J. Kim,. App. Surf. Sci. 2006, 252, 6521.
10. A. G. Shard, P. J. Brewer, F. M. Green, I. S. Gilmore, Surf. Interface Anal. 2007, 39, 294.
11. G. L. Fisher, M. Dickinson, S. R. Bryan, J. Moulder, App. Surf. Sci. 2008, 255, 819.
12. K. D. Krantzman, D. B. Kingsbury, B. J. Garrison, App. Surf. Sci. 2006, 252, 6463.
13. K. D. Krantzman, B. J. Garrison, J. Phys. Chem. C 2009, 113, 3239.
14. R. Paruch, L. Rzeznik, M. F. Russo, B. J. Garrison, Z. Postawa, J. Phys. Chem. C 2010, 114, 5532.
15. P. Sigmund, J. Mater. Sci. 1973, 8, 1545.
16. R. M. Bradley, J. M. E. Harper, J. Vac. Sci. Technol. 1988, 6, 2390.
17. Q. Wei, M. Eddy, K. Li, L. Wang, J. Phys. D. 2009, 42, 165304.
18. J. Tersoff, Phy. Rev. B 1989, 39, 5566.