Metrological performance of SEM 3D techniques

17th Symposium on Photonic Measurements 2008, 18th IMEKO TC 2 Symposium on Photonics in Measurements 2008

Volumn , Issue , 2008, Pages 120-125

  Marinello, Francesco ^a,b   Carmignato, Simone ^a   Savio, Enrico ^a   Bariani, Paolo ^c   Carli, Lorenzo ^d   Horsewell, Andy ^d   De Chiffre, Leonardo ^d  

^a UNIVERSITY OF PADOVA   (Italy)

^b Coordinamento Interuniversitario Veneto Per le Nanotecnologie ^*  (Italy)

^c South East Europe srl   (Italy)

^d TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Metrology; SEM 3D; Stereo microscopy; Surface reconstruction; Traceability

Indexed keywords

3D CHARACTERIZATION; 3D RECONSTRUCTION; CRITICAL FACTORS; INSTRUMENTAL VARIABLES; MEASUREMENT PARAMETERS; METROLOGICAL PERFORMANCE; MODEL FUNCTIONS; RECONSTRUCTION ACCURACY; RELATIVE UNCERTAINTY; SCANNED IMAGES; STEREO-MICROSCOPY; STEREOPHOTOGRAMMETRY; THREE-DIMENSIONAL MEASUREMENTS; TILTING ANGLE; TRACEABILITY;

MEASUREMENTS; PHOTONICS; SCANNING ELECTRON MICROSCOPY; SURFACE RECONSTRUCTION; THREE DIMENSIONAL COMPUTER GRAPHICS; UNCERTAINTY ANALYSIS;

THREE DIMENSIONAL;

EID: 84872547463     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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