Measuring surface topography with scanning electron microscopy. I. EZEImage: A program to obtain 3D surface data

Microscopy and Microanalysis

Volumn 12, Issue 2, 2006, Pages 170-177

  Ponz, Ezequiel ^a   Ladaga, Juan Luis ^b   Bonetto, Rita Dominga ^a,b  

^a DEPARTAMENTO DE QUÍMICA   (Argentina)

^b UNIVERSIDAD NACIONAL DEL CENTRO DE LA PROVINCIA DE BUENOS AIRES   (Argentina)

Author keywords

3D surface topography in SEM; Dense height map; Dynamic programming; Fast cross correlation; Program

Indexed keywords

SILICON;

ALGORITHM; ARTICLE; CHEMISTRY; COMPUTER PROGRAM; IMAGE PROCESSING; METHODOLOGY; NORMAL DISTRIBUTION; REPRODUCIBILITY; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTY;

ALGORITHMS; IMAGE PROCESSING, COMPUTER-ASSISTED; MICROSCOPY, ELECTRON, SCANNING; NORMAL DISTRIBUTION; REPRODUCIBILITY OF RESULTS; SILICON; SOFTWARE; SURFACE PROPERTIES;

EID: 33644866417     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927606060028     Document Type: Article

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