Errors in nanometrology by SEM

Nanotechnology

Volumn 15, Issue 9, 2004, Pages 1195-1199

  Cazaux, J ^a  

^a UNIVERSITÉ DE REIMS CHAMPAGNE ARDENNE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CRYSTAL STRUCTURE; ERROR ANALYSIS; NANOSTRUCTURED MATERIALS; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR QUANTUM WELLS; TRANSMISSION ELECTRON MICROSCOPY;

GAUSSIAN FUNCTION; MINIMUM DETECTABLE DETAIL (MDD); NANOCRYSTALLITES; SCANNING AUGER MICROSCOPY;

NANOTECHNOLOGY;

EID: 4544244585     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/9/015     Document Type: Article

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