Effect of laser power on orientation and microstructure of TiO2 films prepared by laser chemical vapor deposition method

Materials Letters

Volumn 93, Issue , 2013, Pages 179-182

  Guo, Dongyun ^a,b   Ito, Akihiko ^b   Goto, Takashi ^b   Tu, Rong ^b   Wang, Chuanbin ^a   Shen, Qiang ^a   Zhang, Lianmeng ^a  

^a WUHAN UNIVERSITY OF TECHNOLOGY   (China)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Laser chemical vapor deposition; Laser power; Microstructure; Orientation; TiO2 film

Indexed keywords

DEPOSITION TEMPERATURES; FACETED GRAINS; GRAIN SIZE; HIGH DEPOSITION RATES; LASER CHEMICAL VAPOR DEPOSITION; LASER POWER; RUTILE TIO; TIO;

CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; LASERS; MICROSTRUCTURE; OXIDE MINERALS; TITANIUM DIOXIDE; VAPORS;

FILM PREPARATION;

EID: 84871821161     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2012.11.121     Document Type: Article

References (21)

1. U. Diebold The surface science of titanium dioxide Surf Sci Rep 48 2003 53 229
2. 2 thin film for high-k gate insulator Thin Solid Films 424 2003 224 228
3. D.A.H. Hanaor, and C.C. Sorrell Review of the anatase to rutile phase transformation J Mater Sci 46 2011 855 874
4. 2 photocatalysis and related surface phenomena Surf Sci Rep 63 2008 515 582
5. A. Fujishima, and K. Honda Electrochemical photolysis of water at a semiconductor electrode Nature 238 1972 37 38
6. 2) Phys Rev 124 1961 1719 1722
7. 2 thin films on a Ru electrode grown at 250 °C by atomic-layer deposition Appl Phys Lett 85 2004 4112 4114
8. 2-films reactively sputtered from Ti in an RF magnetron Vacuum 47 1996 1333 1336 (Pubitemid 126362050)
9. 2 films prepared by low pressure chemical vapor deposition J Electrochem Soc 140 1993 145 149 (Pubitemid 23597200)
10. 2 CVD: hot-wall reactor results Thin Solid Films 263 1995 65 71
11. 2 thin films J Electroceram 16 2006 447 451 (Pubitemid 44673911)
12. 2 films grown by spray pyrolysis Thin Solid Films 515 2006 674 677 (Pubitemid 44404198)
13. 2 thick films for high-energy density capacitor applications Int J Appl Ceram Technol 8 2011 1363 1373
14. 2 films prepared by laser CVD using Nd:YAG laser Key Eng Mater 508 2012 287 290
15. T. Goto, and T. Kimura Laser chemical vapor deposition of thick oxide coatings Key Eng Mater 317-318 2006 495 500 (Pubitemid 44074488)
16. 2 thick film by laser chemical vapor deposition method. J Mater Sci Mater Electron, 10.1007/s10854-012-1008-y, in press.
17. 5 films and their in-plane orientations Appl Surf Sci 259 2012 178 185
18. 30 film prepared by laser chemical vapor deposition J Mater Sci 47 2012 1559 1561
19. 9 film by laser chemical vapor deposition J Mater Sci Mater Electron 23 2012 897 900
20. 4 film by laser chemical vapor deposition Mater Lett 70 2012 135 137
21. 2 surfaces Phys Rev B 49 1994 16721 16727