A tunable optofluidic silicon optical bench

Journal of Microelectromechanical Systems

Volumn 21, Issue 6, 2012, Pages 1357-1364

  Weber, Niklas ^a   Zappe, Hans ^a   Seifert, Andreas ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Endoscopy; membrane lenses; microoptics; optical coherence tomography (OCT); optofluidics; silicon optical bench (SiOB)

Indexed keywords

ENDOSCOPIC IMAGING; FOCAL LENGTHS; HIGH-PRECISION; OPTICAL ARRANGEMENT; OPTICAL BENCH; OPTICAL MICROSYSTEMS; OPTO-FLUIDICS; SILICON MICROMACHINING; SILICON OPTICAL BENCH; TUNABLE LENS;

ENDOSCOPY; FLUIDICS; MICROOPTICS; OPTICAL SYSTEMS;

OPTICAL TOMOGRAPHY;

EID: 84870567862     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2206565     Document Type: Article

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