Construction of a fully functional NSOM using MUMPs technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3226, Issue , 1997, Pages 188-194

  Aksyuk, Vladimir ^a   Barber, Bradley ^a   Gammel, Peter ^a   Bishop, David ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

MEMS; Microactuator; Microscope; NSOM; Surface micromachining; XYZ stage

Indexed keywords

LABORATORY EQUIPMENTS; NEAR FIELDS; NSOM; OPTICAL MICROSCOPES; OPTICAL PROBES; OPTICAL-; SCATTERED LIGHTS; SUBMICRON SPATIAL RESOLUTIONS; TECHNOLOGICAL CHALLENGES; UNIVERSAL APPLICATIONS; XYZ STAGE;

ACTUATORS; COMPOSITE MICROMECHANICS; CONSTRUCTION EQUIPMENT; DATA STORAGE EQUIPMENT; MACHINING; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; NEAR FIELD SCANNING OPTICAL MICROSCOPY; OPTICAL MICROSCOPY; PHOTORESISTS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE MICROMACHINING;

MICROSCOPES;

EID: 57649216211     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284566     Document Type: Conference Paper

References (5)

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