Capacitive MEMS microphones

Bell System Technical Journal

Volumn 10, Issue 3, 2005, Pages 187-198

  Elko, Gary W ^a,b,c   Pardo, Flavio ^d   López, Daniel ^d,e,f   Bishop, David ^d,e   Gammel, Peter ^f,g,h  

^a AVAYA LABS RESEARCH   (United States)

^b ACOUSTICAL SOCIETY OF AMERICA   (United States)

^c IEEE   (United States)

^d LUCENT TECHNOLOGIES   (United States)

^e Nanotechnology Consortium ^*  (United States)

^f AMERICAN PHYSICAL SOCIETY   (United States)

^g Advance Nanotech   (United States)

^h SRC Executive Technical Advisory Board

Author keywords

[No Author keywords available]

Indexed keywords

CONSUMER AUDIO APPLICATIONS; CONSUMER DEVICES; ELECTRET MICROPHONES; MEMS MICROPHONES;

CONSUMER ELECTRONICS; DIGITAL SIGNAL PROCESSING; ELECTRETS; HEARING AIDS; INTEGRATED CIRCUITS; MICROPHONES;

MICROELECTROMECHANICAL DEVICES;

EID: 33645507737     PISSN: 00058580     EISSN: 15387305     Source Type: Journal    
DOI: 10.1002/bltj.20113     Document Type: Review

References (10)

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