Fabrication of 1 Teradot/in.2 CoCrPt bit patterned media and recording performance with a conventional read/write head

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 30, Issue 6, 2012, Pages

  Dobisz, Elizabeth A ^a   Kercher, Dan ^a   Grobis, Michael ^a   Hellwig, Olav ^a   Marinero, Ernesto E ^a   Weller, Dieter ^a   Albrecht, Thomas R ^a  

^a WESTERN DIGITAL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D MODELS; A-SPOTS; BIT-PATTERNED MEDIA; CARBON HARD MASKS; DEFECT RATE; DIRECT WRITE E-BEAM LITHOGRAPHIES; DOT PATTERNS; ERROR PROBABILITIES; ERROR RATE; ETCH SELECTIVITY; ETCHING PROCESS; HARDMASKS; HYDROGEN SILSESQUIOXANE; MAGNETIC COERCIVITIES; MAGNETIC ISLAND; MAGNETIC MEDIA; MAGNETIC SWITCHING; MAGNETIC WRITE WIDTHS; MINIMUM ERROR RATE; MONTE CARLO; PATTERNED MAGNETIC MEDIA; PATTERNING PROCESS; RECORDING HEAD; RECORDING PERFORMANCE; SEM MICROGRAPHS; SILVACO; STRAY MAGNETIC FIELDS; SWITCHING FIELD DISTRIBUTION; TOPDOWN;

CARBON; COERCIVE FORCE; DEFECTS; ELECTRON BEAM LITHOGRAPHY; EROSION; MAGNETIC MATERIALS; MAGNETIC RECORDING; MONTE CARLO METHODS; OPTIMIZATION; RECORDING INSTRUMENTS; THREE DIMENSIONAL COMPUTER GRAPHICS;

AUTOMOBILE MANUFACTURE;

EID: 84870387610     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.4757955     Document Type: Article

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